About: Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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Description	The study of the working gas flow and its interaction with the substrate is an important part of diagnostics of plasma in the plasma-chemical reactors. Good knowledge of the parameters of plasma is necessary to understand to processes that take place at plasma-chemical deposition of thin films. We have used the optical diagnostics by holographic interferometer for this purpose. The boundary between subsonic and supersonic flowing gas has been determined by means of interferograms. The distribution of the phase shift into the observed object compared to the state without flowing gas has been determined from the interferogram as well. That gives the possibility of another work purposeful obtaining distribution of mass density into the flowing gas and temperature or pressure, respectively. Studium proudění pracovního plynu a jeho interakce se substrátem jsou důležité části diagnostiky plazmatu v plasma-chemických reaktorech. Dobrá znalost parametrů plazmatu je nutná k pochopení procesů, které probíhají The study of the working gas flow and its interaction with the substrate is an important part of diagnostics of plasma in the plasma-chemical reactors. Good knowledge of the parameters of plasma is necessary to understand to processes that take place at plasma-chemical deposition of thin films. We have used the optical diagnostics by holographic interferometer for this purpose. The boundary between subsonic and supersonic flowing gas has been determined by means of interferograms. The distribution of the phase shift into the observed object compared to the state without flowing gas has been determined from the interferogram as well. That gives the possibility of another work purposeful obtaining distribution of mass density into the flowing gas and temperature or pressure, respectively. Studium proudění pracovního plynu a jeho interakce se substrátem jsou důležité části diagnostiky plazmatu v plasma-chemických reaktorech. Dobrá znalost parametrů plazmatu je nutná k pochopení procesů, které probíhají (en)
Title	Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas (en)
skos:prefLabel	Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas (en)
skos:notation	RIV/60076658:12410/01:00003046!RIV/2002/MSM/124102/N
http://linked.open.../vavai/riv/strany	385-389
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM 124100004)
http://linked.open...vai/riv/dodaniDat	2002
http://linked.open...aciTvurceVysledku	Kříž, Pavel Blažek, Josef
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Jihočeská univerzita v Českých Budějovicích / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	689295
http://linked.open...ai/riv/idVysledku	RIV/60076658:12410/01:00003046
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	holographic interferometry, phase shift, discrete Fourier transformation (holografická interferometrie, fázové posunutí, diskrétní Fourierova transformace) (en)
http://linked.open.../riv/klicoveSlovo	holographic interferometry discrete Fourier transformation (holografická interferometrie diskrétní Fourierova transformace) fázové posunutí phase shift
http://linked.open...ontrolniKodProRIV	[4912EA3D98C9]
http://linked.open...v/mistoKonaniAkce	Praha
http://linked.open...i/riv/mistoVydani	Praha
http://linked.open...i/riv/nazevZdroje	WDS'01
http://linked.open...in/vavai/riv/obor	BL
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http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...UplatneniVysledku	2001
http://linked.open...iv/tvurceVysledku	Blažek, Josef Kříž, Pavel
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2001-06-12 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20124100004
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Matfyzpress
https://schema.org/isbn	80-85863-73-1
http://localhost/t...ganizacniJednotka	12410

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