About: Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen     Goto   Sponge   NotDistinct   Permalink

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  • Dual-mode microwave/radiofrequency (MW/RF) plasmas were systematically investigated by means of Langmuir probe measurements and by mass spectrometry. Maxwellian-like electron distribution functions were found for both MW and MW/RF argon plasmas, while the distribution functions measured in nitrogen revealed two groups of electrons with different energies. Both in argon and nitrogen, the electron density, ne decreased with rising pressure, almost independent of the bias voltage on the RF electrode. The ne value decays exponentially with distance from the MW applicator with a characteristic length comparable to the skin depth. Comparison of ne values from the probe measurements with values calculated from the ion energy distribution functions and ion fluxes exhibit an excellent agreement.
  • Dual-mode microwave/radiofrequency (MW/RF) plasmas were systematically investigated by means of Langmuir probe measurements and by mass spectrometry. Maxwellian-like electron distribution functions were found for both MW and MW/RF argon plasmas, while the distribution functions measured in nitrogen revealed two groups of electrons with different energies. Both in argon and nitrogen, the electron density, ne decreased with rising pressure, almost independent of the bias voltage on the RF electrode. The ne value decays exponentially with distance from the MW applicator with a characteristic length comparable to the skin depth. Comparison of ne values from the probe measurements with values calculated from the ion energy distribution functions and ion fluxes exhibit an excellent agreement. (en)
Title
  • Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen
  • Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen (en)
skos:prefLabel
  • Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen
  • Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen (en)
skos:notation
  • RIV/60076658:12410/01:00003007!RIV/2002/MSM/124102/N
http://linked.open.../vavai/riv/strany
  • 653-658
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 124100004)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 679135
http://linked.open...ai/riv/idVysledku
  • RIV/60076658:12410/01:00003007
http://linked.open...riv/jazykVysledku
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  • electron distribution functions, Langmuir probe measurements (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [28680158FC23]
http://linked.open...v/mistoKonaniAkce
  • Orléans
http://linked.open...i/riv/mistoVydani
  • University of Orléans
http://linked.open...i/riv/nazevZdroje
  • 15th International symposium on Plasma Chemistry
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Hong, J.
  • Špatenka, Petr
  • Pavel, J.
  • Šerý, Michal
  • Martinu, L.
  • Wertheimer, M. R.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • GREMI, CNRS/University of Orléans
http://localhost/t...ganizacniJednotka
  • 12410
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