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  • The paper reports results obtained from optical spectrophotometry complemented with data from FTIR, Raman scattering and XRD measurements to characterize hydrogenated silicon (Si:H) thin films deposited by PECVD deposition from silane - argon plasma diluted with hydrogen. The dispersive optical properties and microstructure have been determined as a function of the hydrogen dilution which has been found to result in an inhomogeneous growth during which the material evolves from amorphous Si:H to microcrystalline Si:H.
  • The paper reports results obtained from optical spectrophotometry complemented with data from FTIR, Raman scattering and XRD measurements to characterize hydrogenated silicon (Si:H) thin films deposited by PECVD deposition from silane - argon plasma diluted with hydrogen. The dispersive optical properties and microstructure have been determined as a function of the hydrogen dilution which has been found to result in an inhomogeneous growth during which the material evolves from amorphous Si:H to microcrystalline Si:H. (en)
Title
  • Dispersive and BEMA investigation on optical properties of photovoltaic thin films
  • Dispersive and BEMA investigation on optical properties of photovoltaic thin films (en)
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  • Dispersive and BEMA investigation on optical properties of photovoltaic thin films
  • Dispersive and BEMA investigation on optical properties of photovoltaic thin films (en)
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  • RIV/49777513:23640/14:43924797!RIV15-MSM-23640___
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  • P(ED2.1.00/03.0088)
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  • 11764
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  • RIV/49777513:23640/14:43924797
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  • effective medium approximation; optical properties; microvoids; microcrystalline; amorphous silicon (en)
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  • [1FC82FFF95FB]
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  • Wojanov Palace Jelenia Gora, Polsko
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  • Bellingham
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  • Proceedings of SPIE - The International Society for Optical Engineering
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  • Netrvalová, Marie
  • Šutta, Pavol
  • Prušáková, Lucie
  • Müllerová, Jarmila
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issn
  • 0277-786X
number of pages
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  • 10.1117/12.2086805
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  • SPIE
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  • 978-1-62841-556-8
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  • 23640
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