About: Investigation of Preferred Orientation of ZnO Thin Films Prepared by Magnetron Sputtering

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Zinc Oxide (ZnO) is a wide bandgap semiconductor material which can be successfully used for wide variety of applications such as biosensors and acoustic resonator devices. ZnO normally crystallizes in the wurtzite structure with c-axis (002) preferred orientation. However, for bio-sensing in liquids, it is necessary to generate a shear horizontal mode wave, where the wave displacement is within the plane of the crystal surface. For generation of a shear horizontal wave, a-axis film textures such as the (110) or (100) are necessary. This work is focused on the preferred orientation control of ZnO film prepared by radio frequency magnetron sputtering. It was found that preferred orientation can be controlled by energy delivered to unit volume of the film at suitable substrate temperature. We have identified three different deposition regimes leading to distinctive preferred orientation. Zinc Oxide (ZnO) is a wide bandgap semiconductor material which can be successfully used for wide variety of applications such as biosensors and acoustic resonator devices. ZnO normally crystallizes in the wurtzite structure with c-axis (002) preferred orientation. However, for bio-sensing in liquids, it is necessary to generate a shear horizontal mode wave, where the wave displacement is within the plane of the crystal surface. For generation of a shear horizontal wave, a-axis film textures such as the (110) or (100) are necessary. This work is focused on the preferred orientation control of ZnO film prepared by radio frequency magnetron sputtering. It was found that preferred orientation can be controlled by energy delivered to unit volume of the film at suitable substrate temperature. We have identified three different deposition regimes leading to distinctive preferred orientation. (en)
Title	Investigation of Preferred Orientation of ZnO Thin Films Prepared by Magnetron Sputtering Investigation of Preferred Orientation of ZnO Thin Films Prepared by Magnetron Sputtering (en)
skos:prefLabel	Investigation of Preferred Orientation of ZnO Thin Films Prepared by Magnetron Sputtering Investigation of Preferred Orientation of ZnO Thin Films Prepared by Magnetron Sputtering (en)
skos:notation	RIV/49777513:23640/14:43924054!RIV15-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(ED2.1.00/03.0088)
http://linked.open...iv/cisloPeriodika	12
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Netrvalová, Marie Šutta, Pavol Medlín, Rostislav Novák, Petr Říha, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	22752
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/14:43924054
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Thin Films; Magnetron Sputtering; Preferred Orientation; Structure; ZnO (en)
http://linked.open.../riv/klicoveSlovo	Thin Films Magnetron Sputtering Preferred Orientation Structure ZnO
http://linked.open...odStatuVydavatele	CA - Kanada
http://linked.open...ontrolniKodProRIV	[A788A5932EE2]
http://linked.open...i/riv/nazevZdroje	Sensor Letters
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Centre of the New Technologies and Materials
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	12
http://linked.open...iv/tvurceVysledku	Novák, Petr Netrvalová, Marie Říha, Jan Šutta, Pavol Medlín, Rostislav
issn	1546-198X
number of pages	5 (xsd:int)
http://bibframe.org/vocab/doi	10.1166/sl.2014.3399
http://localhost/t...ganizacniJednotka	23640

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