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  • We have synthesized silicon nanocrystalline structures from thermal annealing of thin film amorphous silicon-based multilayers. The annealing procedure that was carried out in vacuum at temperatures up to 1100 degrees C is integrated in a X-ray diffraction (XRD) setup for real-time monitoring of the formation phases of the nanostructures. The microstructure of the crystallized films is investigated through experimental measurements combined with atomistic simulations of realistic nanocrystalline silicon (nc-Si) models. The multilayers consisting of uniformly alternating thicknesses of hydrogenated amorphous silicon and silicon oxide (SiO2) were deposited by plasma enhanced chemical vapor deposition on crystalline silicon and Corning glass substrates.
  • We have synthesized silicon nanocrystalline structures from thermal annealing of thin film amorphous silicon-based multilayers. The annealing procedure that was carried out in vacuum at temperatures up to 1100 degrees C is integrated in a X-ray diffraction (XRD) setup for real-time monitoring of the formation phases of the nanostructures. The microstructure of the crystallized films is investigated through experimental measurements combined with atomistic simulations of realistic nanocrystalline silicon (nc-Si) models. The multilayers consisting of uniformly alternating thicknesses of hydrogenated amorphous silicon and silicon oxide (SiO2) were deposited by plasma enhanced chemical vapor deposition on crystalline silicon and Corning glass substrates. (en)
Title
  • Crystallized silicon nanostructures - experimental characterization and atomistic simulations
  • Crystallized silicon nanostructures - experimental characterization and atomistic simulations (en)
skos:prefLabel
  • Crystallized silicon nanostructures - experimental characterization and atomistic simulations
  • Crystallized silicon nanostructures - experimental characterization and atomistic simulations (en)
skos:notation
  • RIV/49777513:23640/14:43923959!RIV15-MSM-23640___
http://linked.open...avai/riv/aktivita
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  • P(ED2.1.00/03.0088)
http://linked.open...iv/cisloPeriodika
  • 7-8
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 9310
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  • RIV/49777513:23640/14:43923959
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  • hydrogen; superlattices; structural properties; Nanocrystalline silicon (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CA - Kanada
http://linked.open...ontrolniKodProRIV
  • [70AAF96810B2]
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  • Canadian Journal of Physics
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  • 98
http://linked.open...iv/tvurceVysledku
  • Šutta, Pavol
  • Calta, Pavel
  • Agbo, Solomon Nwabueze
  • Biswas, Rana
  • Pan, Bicai
http://linked.open...ain/vavai/riv/wos
  • 000339379500051
issn
  • 0008-4204
number of pages
http://bibframe.org/vocab/doi
  • 10.1139/cjp-2013-0442
http://localhost/t...ganizacniJednotka
  • 23640
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