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Description
| - This paper reports the synthesis and characterization of silicon quantum dots (QDs) obtained by thermal annealing of hydrogenated amorphous silicon (a-Si:H)/silicon oxide(SiO2) supperlattices deposited by plasma-enhanced chemical vapour deposition (PE-CVD). The asdeposited supperlattices have been annealed in high-temperature vacuum chamber, at temperatures up to 1100 °C, where in-situ phase transformation was monitored by x-ray diffractometry, XRD. It is shown that onset of crystallization and phase separation occur at different annealing temperature depending on the a-Si:H sub-layer thickness. Complete crystallization of the films and precipitation of the QDs occur at 1000 oC.
- This paper reports the synthesis and characterization of silicon quantum dots (QDs) obtained by thermal annealing of hydrogenated amorphous silicon (a-Si:H)/silicon oxide(SiO2) supperlattices deposited by plasma-enhanced chemical vapour deposition (PE-CVD). The asdeposited supperlattices have been annealed in high-temperature vacuum chamber, at temperatures up to 1100 °C, where in-situ phase transformation was monitored by x-ray diffractometry, XRD. It is shown that onset of crystallization and phase separation occur at different annealing temperature depending on the a-Si:H sub-layer thickness. Complete crystallization of the films and precipitation of the QDs occur at 1000 oC. (en)
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Title
| - Structural Analysis of Silicon Nanostructures Obtained from Thermal Annealing of a-Si:H/SiO2 Superlattices
- Structural Analysis of Silicon Nanostructures Obtained from Thermal Annealing of a-Si:H/SiO2 Superlattices (en)
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skos:prefLabel
| - Structural Analysis of Silicon Nanostructures Obtained from Thermal Annealing of a-Si:H/SiO2 Superlattices
- Structural Analysis of Silicon Nanostructures Obtained from Thermal Annealing of a-Si:H/SiO2 Superlattices (en)
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skos:notation
| - RIV/49777513:23640/14:43923247!RIV15-MSM-23640___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23640/14:43923247
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - x-ray diffraction; nanocrystalline silicon; quantum dots; Multilayers (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - Key Engineering Materials
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Netrvalová, Marie
- Šutta, Pavol
- Prušáková, Lucie
- Calta, Pavel
- Vavruňková, Veronika
- Agbo, Solomon Nwabueze
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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issn
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number of pages
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http://bibframe.org/vocab/doi
| - 10.4028/www.scientific.net/KEM.605.295
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http://purl.org/ne...btex#hasPublisher
| - Trans Tech Publications LTD
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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