About: In-process ZnO thin films alloying during pulsed laser deposition

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Alloyed ZnO:Al thin ?lms were prepared by a pulsed laser deposition by the altering of two pure targets (ZnO and Al) during the deposition process. Two deposition temperatures ( ? 197 °C and 400 °C) were applied and differences of diffusion dynamics were compared. As-grown layered ?lms were annealed and aluminium distribution was homogenized. The results revealed that the amorphous structure (samples grown at ? 197 °C) of ZnO provide more positive conditions for ef?cient Al diffusion in comparison with crystalline structure (samples grown at 400 °C). A detailed investigation by SIMS depth pro?ling con?rmed a homogeneous chemical composition of annealed and recrystallized ?lms which exhibited a porous nature and wurtzite crystalline structure. Alloyed ZnO:Al thin ?lms were prepared by a pulsed laser deposition by the altering of two pure targets (ZnO and Al) during the deposition process. Two deposition temperatures ( ? 197 °C and 400 °C) were applied and differences of diffusion dynamics were compared. As-grown layered ?lms were annealed and aluminium distribution was homogenized. The results revealed that the amorphous structure (samples grown at ? 197 °C) of ZnO provide more positive conditions for ef?cient Al diffusion in comparison with crystalline structure (samples grown at 400 °C). A detailed investigation by SIMS depth pro?ling con?rmed a homogeneous chemical composition of annealed and recrystallized ?lms which exhibited a porous nature and wurtzite crystalline structure. (en)
Title	In-process ZnO thin films alloying during pulsed laser deposition In-process ZnO thin films alloying during pulsed laser deposition (en)
skos:prefLabel	In-process ZnO thin films alloying during pulsed laser deposition In-process ZnO thin films alloying during pulsed laser deposition (en)
skos:notation	RIV/49777513:23640/13:43918218!RIV14-MSM-23640___
http://linked.open...avai/predkladatel	Nové technologie - výzkumné centrum
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...iv/cisloPeriodika	4
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Netrvalová, Marie Šutta, Pavol
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	80384
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/13:43918218
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	crystal structure; amorphous structure; pulsed laser deposition; ZnO (en)
http://linked.open.../riv/klicoveSlovo	amorphous structure crystal structure pulsed laser deposition ZnO
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[091030079ECA]
http://linked.open...i/riv/nazevZdroje	APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	110
http://linked.open...iv/tvurceVysledku	Bruncko, Jaroslav Michalka, Miroslav Netrvalová, Marie Vincze, Andrej Šutta, Pavol Uherek, František
issn	0947-8396
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1007/s00339-012-7190-1
http://localhost/t...ganizacniJednotka	23640

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