About: Influence of deposition conditions of ZnO thin films on their photonic properties

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Description	The effects of deposition conditions (especially lateral position against target during deposition and deposition temperature) on optical properties and structure are presented. The X-ray diffraction (XRD) analysis showed that all the films were polycrystalline with hexagonal structure and preferred orientation in [001] direction perpendicular to the substrate surface. Micro-structure properties as crystallite size and micro-strains were not too influenced by deposition conditions and values of crystallites were evaluated in tens of nanometers and micro-strains were about 10 -2 . Film thicknesses obtained from transmittance spectra decreased more than two times with increased lateral position of the samples against the target. Dispersion of the spectral refractive index was observed depending on the sample position in deposition chamber. Smaller dispersion was observed in series containing more redundant oxygen in their structure. The effects of deposition conditions (especially lateral position against target during deposition and deposition temperature) on optical properties and structure are presented. The X-ray diffraction (XRD) analysis showed that all the films were polycrystalline with hexagonal structure and preferred orientation in [001] direction perpendicular to the substrate surface. Micro-structure properties as crystallite size and micro-strains were not too influenced by deposition conditions and values of crystallites were evaluated in tens of nanometers and micro-strains were about 10 -2 . Film thicknesses obtained from transmittance spectra decreased more than two times with increased lateral position of the samples against the target. Dispersion of the spectral refractive index was observed depending on the sample position in deposition chamber. Smaller dispersion was observed in series containing more redundant oxygen in their structure. (en)
Title	Influence of deposition conditions of ZnO thin films on their photonic properties Influence of deposition conditions of ZnO thin films on their photonic properties (en)
skos:prefLabel	Influence of deposition conditions of ZnO thin films on their photonic properties Influence of deposition conditions of ZnO thin films on their photonic properties (en)
skos:notation	RIV/49777513:23640/11:43897335!RIV12-MSM-23640___
http://linked.open...avai/predkladatel	Nové technologie - výzkumné centrum
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031), P(ED2.1.00/03.0088)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Netrvalová, Marie Šutta, Pavol Prušáková, Lucie Novák, Petr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	204373
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/11:43897335
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	refractive index; UV/Vis spectrophotometry; XRD; ZnO (en)
http://linked.open.../riv/klicoveSlovo	UV/Vis spectrophotometry XRD refractive index ZnO
http://linked.open...ontrolniKodProRIV	[2DFB99891890]
http://linked.open...v/mistoKonaniAkce	Prague, Czech republic
http://linked.open...i/riv/mistoVydani	Bellingham
http://linked.open...i/riv/nazevZdroje	Proceedings of SPIE
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection Centre of the New Technologies and Materials
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Novák, Petr Netrvalová, Marie Šutta, Pavol Prušáková, Lucie
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2011-08-24 (xsd:date)
issn	0277-786X
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1117/12.912462
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	978-0-8194-8953-1
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Influence of deposition conditions of ZnO thin films on their photonic properties Influence of deposition conditions of ZnO thin films on their photonic properties

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