About: Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The a-Si:H ?lms with different thickness and microstructure have been deposited with rf-PECVD using a plasma of silane diluted with hydrogen. The structure and optical analysis were carried out by X-ray diffraction, UV/VIS and Raman spectroscopy. Spectral refractive indices, optical energy band gaps, extinction coef?cients, phases ratio and grain size were determined as a function of the hydrogen dilution (R = H2/SiH4). Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to micro-crystalline hydrogenated silicon (mc-Si:H). XRD analysis indicated that ?lms with R = 0 and R = 20 were amorphous and homogeneous, while ?lms with R = 40 and higher were micro-crystalline consisting medium range ordered silicon hydride (Si4H) and mc-Si phases with different size of crystallites, which was con?rmed also by Raman spectroscopy. The a-Si:H ?lms with different thickness and microstructure have been deposited with rf-PECVD using a plasma of silane diluted with hydrogen. The structure and optical analysis were carried out by X-ray diffraction, UV/VIS and Raman spectroscopy. Spectral refractive indices, optical energy band gaps, extinction coef?cients, phases ratio and grain size were determined as a function of the hydrogen dilution (R = H2/SiH4). Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to micro-crystalline hydrogenated silicon (mc-Si:H). XRD analysis indicated that ?lms with R = 0 and R = 20 were amorphous and homogeneous, while ?lms with R = 40 and higher were micro-crystalline consisting medium range ordered silicon hydride (Si4H) and mc-Si phases with different size of crystallites, which was con?rmed also by Raman spectroscopy. (en)
Title	Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition (en)
skos:prefLabel	Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition (en)
skos:notation	RIV/49777513:23640/10:43898566!RIV12-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...iv/cisloPeriodika	4
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Netrvalová, Marie Šutta, Pavol Prušáková, Lucie Vavruňková, Veronika
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	277145
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/10:43898566
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Raman spectroscopy; X-ray diffraction; PE-CVD; Phase transition; a-Si:H ?lm (en)
http://linked.open.../riv/klicoveSlovo	Phase transition Raman spectroscopy X-ray diffraction PE-CVD a-Si:H ?lm
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[CC0E415F5EBD]
http://linked.open...i/riv/nazevZdroje	Vacuum
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	85
http://linked.open...iv/tvurceVysledku	Netrvalová, Marie Šutta, Pavol Prušáková, Lucie Müllerová, Jarmila Vavruňková, Veronika
issn	0042-207X
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.vacuum.2010.01.021
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition

Faceted Search & Find service v1.16.116 as of Feb 22 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3239 as of Feb 22 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 67 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software