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  • Transparent and electrically conductive (TCO) thin films of ZnO:Al, ZnO:Ga and ZnO:Sc, used in solar cells as well as optoelectronic devices, have been successfully deposited by rf magnetron sputter deposition using ZnO(98%)/X2O3 (2%) ceramic target, X = {Al, Ga, Sc}, in the inert atmosphere of argon. In this contribution we focused on the changes in physical properties and their comparison in dependence on doping element. The XRD analyses, four probe measurements and UV-VIS spectroscopy were applied to investigate the structure (texture, lattice stress, grain size), electrical (resistivity) and optical (transmittance, optical band gap) properties of TCOs on the glass substrates.
  • Transparent and electrically conductive (TCO) thin films of ZnO:Al, ZnO:Ga and ZnO:Sc, used in solar cells as well as optoelectronic devices, have been successfully deposited by rf magnetron sputter deposition using ZnO(98%)/X2O3 (2%) ceramic target, X = {Al, Ga, Sc}, in the inert atmosphere of argon. In this contribution we focused on the changes in physical properties and their comparison in dependence on doping element. The XRD analyses, four probe measurements and UV-VIS spectroscopy were applied to investigate the structure (texture, lattice stress, grain size), electrical (resistivity) and optical (transmittance, optical band gap) properties of TCOs on the glass substrates. (en)
Title
  • Study of ZnO films grown with different dopants - physical properties and their comparison
  • Study of ZnO films grown with different dopants - physical properties and their comparison (en)
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  • Study of ZnO films grown with different dopants - physical properties and their comparison
  • Study of ZnO films grown with different dopants - physical properties and their comparison (en)
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  • RIV/49777513:23640/10:00503644!RIV11-MSM-23640___
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  • P(1M06031)
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  • 290882
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  • RIV/49777513:23640/10:00503644
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  • ZnO:Al; ZnO:Ga; ZnO:Sc; physical properties (en)
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  • [5DBE4EC8254C]
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  • Smolenice Castle, Slovakia
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  • New York
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  • ASDAM 2010
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  • Netrvalová, Marie
  • Šutta, Pavol
  • Prušáková, Lucie
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  • IEEE Nuclear and Plasma Sciences Society
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  • 978-1-4244-8572-7
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  • 23640
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