About: Structure and optical properties of the hydrogen diluted a-Si:H thin films prepared by PECVD with different deposition temperatures

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About: Structure and optical properties of the hydrogen diluted a-Si:H thin films prepared by PECVD with different deposition temperatures Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper deals with the hydrogenated amorphous silicon (a-Si:H) films about 300 nm in thickness prepared by using rf-PECVD with hydrogen dilution R = 10 of the silane source gas in the amorphous growth regime onto clean Corning Eagle 2000 glass substrates at different deposition temperatures ranging from 50 to 200 °C. Structural and optical properties of the films were obtained from X-ray diffraction and UV-Vis spectrophotometry. The full width at half maximum of the first scattering peak decreases with increasing of the deposition temperature up to 150 °C and then remains constant. Optical band-gaps are from 1.65 to 1.76 eV, which slightly decrease with increasing deposition temperature, whereas the refractive index increases with increasing deposition temperature. This indicates that the density of the films at higher temperature has increased. The paper deals with the hydrogenated amorphous silicon (a-Si:H) films about 300 nm in thickness prepared by using rf-PECVD with hydrogen dilution R = 10 of the silane source gas in the amorphous growth regime onto clean Corning Eagle 2000 glass substrates at different deposition temperatures ranging from 50 to 200 °C. Structural and optical properties of the films were obtained from X-ray diffraction and UV-Vis spectrophotometry. The full width at half maximum of the first scattering peak decreases with increasing of the deposition temperature up to 150 °C and then remains constant. Optical band-gaps are from 1.65 to 1.76 eV, which slightly decrease with increasing deposition temperature, whereas the refractive index increases with increasing deposition temperature. This indicates that the density of the films at higher temperature has increased. (en)
Title	Structure and optical properties of the hydrogen diluted a-Si:H thin films prepared by PECVD with different deposition temperatures Structure and optical properties of the hydrogen diluted a-Si:H thin films prepared by PECVD with different deposition temperatures (en)
skos:prefLabel	Structure and optical properties of the hydrogen diluted a-Si:H thin films prepared by PECVD with different deposition temperatures Structure and optical properties of the hydrogen diluted a-Si:H thin films prepared by PECVD with different deposition temperatures (en)
skos:notation	RIV/49777513:23640/10:00503615!RIV11-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Netrvalová, Marie Šutta, Pavol
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	290475
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/10:00503615
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	a-Si:H; physical properties; deposition temperature; hydrogen diluted (en)
http://linked.open.../riv/klicoveSlovo	deposition temperature a-Si:H physical properties hydrogen diluted
http://linked.open...ontrolniKodProRIV	[FC27B38B3A96]
http://linked.open...v/mistoKonaniAkce	Smolenice Castle, Slovakia
http://linked.open...i/riv/mistoVydani	New York
http://linked.open...i/riv/nazevZdroje	ASDAM 2010
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Netrvalová, Marie Šutta, Pavol Fischer, Marinus Müllerová, Jarmila Zeman, Miro
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-01-01 (xsd:date)
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	IEEE Nuclear and Plasma Sciences Society
https://schema.org/isbn	978-1-4244-8572-7
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Structure and optical properties of the hydrogen diluted a-Si:H thin films prepared by PECVD with different deposition temperatures Structure and optical properties of the hydrogen diluted a-Si:H thin films prepared by PECVD with different deposition temperatures Structure and optical properties of the hydrogen diluted a-Si:H thin films prepared by PECVD with different deposition temperatures

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