About: Pulsed laser deposition of ZnO in N2O atmosphere

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Description	The contribution deals with ZnO thin layers doped by nitrogen which were prepared by pulsed laser deposition in N2O ambient atmosphere. Our approach is based on ablation of undoped ZnO target in active atmosphere containing N2O gas without any supporting excitation equipment in parallel. Ablation of ZnO target was performed at different pressures (from 1 to 32 Pa) of N2O ambient atmosphere by pulsed Nd:YAG laser (at 355 nm). Layers of ZnO were grown on different substrates (Si, sapphire, fused silica) and their properties were investigated by various analytical methods: scanning electron microscopy (SEM), secondary ion mass spectroscopy (SIMS), X-ray diffraction (XRD), and optical transmission spectroscopy. The results confirmed incorporation of nitrogen into ZnO layers and its concentration was pressure dependent. According to SIMS analysis, there is a certain pressure level (above 10 Pa) when the presence of N becomes negligible. Transmittance spectra showed increasing of the optical band gap (Eg) The contribution deals with ZnO thin layers doped by nitrogen which were prepared by pulsed laser deposition in N2O ambient atmosphere. Our approach is based on ablation of undoped ZnO target in active atmosphere containing N2O gas without any supporting excitation equipment in parallel. Ablation of ZnO target was performed at different pressures (from 1 to 32 Pa) of N2O ambient atmosphere by pulsed Nd:YAG laser (at 355 nm). Layers of ZnO were grown on different substrates (Si, sapphire, fused silica) and their properties were investigated by various analytical methods: scanning electron microscopy (SEM), secondary ion mass spectroscopy (SIMS), X-ray diffraction (XRD), and optical transmission spectroscopy. The results confirmed incorporation of nitrogen into ZnO layers and its concentration was pressure dependent. According to SIMS analysis, there is a certain pressure level (above 10 Pa) when the presence of N becomes negligible. Transmittance spectra showed increasing of the optical band gap (Eg) (en)
Title	Pulsed laser deposition of ZnO in N2O atmosphere Pulsed laser deposition of ZnO in N2O atmosphere (en)
skos:prefLabel	Pulsed laser deposition of ZnO in N2O atmosphere Pulsed laser deposition of ZnO in N2O atmosphere (en)
skos:notation	RIV/49777513:23640/10:00503426!RIV11-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...iv/cisloPeriodika	4
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Netrvalová, Marie Šutta, Pavol
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	283485
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/10:00503426
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ZnO; N2O atmosphere; pulsed laser deposition (en)
http://linked.open.../riv/klicoveSlovo	pulsed laser deposition N2O atmosphere ZnO
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[49EE147624CC]
http://linked.open...i/riv/nazevZdroje	Applied Physics A - Materials Science & Processing
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	101
http://linked.open...iv/tvurceVysledku	Bruncko, Jaroslav Netrvalová, Marie Vincze, Andrej Šutta, Pavol Uherek, František
issn	0947-8396
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Pulsed laser deposition of ZnO in N2O atmosphere Pulsed laser deposition of ZnO in N2O atmosphere Pulsed laser deposition of ZnO in N2O atmosphere

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