About: Study of Re-crystallization Processes in Amorphous Silicon Films

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Description	Technology of amorphous hydrogenated silicon (a-Si:H) thin films is a subject of interest of many researchers. This paper deals with the re-crystallization processes in a-Si:H thin films prepared by plasma enhanced chemical vapour deposition (PECVD) using a SAMCO PD-220N unit. Evaluation of crystallization process was monitored in a high temperature chamber AP1200 by using ?in-situ? X-ray diffraction (XRD). The experiments have given information about phase transformation from the amorphous to polycrystalline phase and were carried out at temperatures in the range of 580 °C to 620 °C. The average crystalline size of crystallized films was found from 40 to 50 nm. Structural properties of the initial amorphous and re-crystallized films were also investigated by Raman spectroscopy. Optical properties (refractive indices, extinction coefficients) of a-Si:H and poly-Si films were analyzed by UV Vis spectrophotometry. The absorption properties of the films were carried out from the UV Vis experimental data. Technology of amorphous hydrogenated silicon (a-Si:H) thin films is a subject of interest of many researchers. This paper deals with the re-crystallization processes in a-Si:H thin films prepared by plasma enhanced chemical vapour deposition (PECVD) using a SAMCO PD-220N unit. Evaluation of crystallization process was monitored in a high temperature chamber AP1200 by using ?in-situ? X-ray diffraction (XRD). The experiments have given information about phase transformation from the amorphous to polycrystalline phase and were carried out at temperatures in the range of 580 °C to 620 °C. The average crystalline size of crystallized films was found from 40 to 50 nm. Structural properties of the initial amorphous and re-crystallized films were also investigated by Raman spectroscopy. Optical properties (refractive indices, extinction coefficients) of a-Si:H and poly-Si films were analyzed by UV Vis spectrophotometry. The absorption properties of the films were carried out from the UV Vis experimental data. (en)
Title	Study of Re-crystallization Processes in Amorphous Silicon Films Study of Re-crystallization Processes in Amorphous Silicon Films (en)
skos:prefLabel	Study of Re-crystallization Processes in Amorphous Silicon Films Study of Re-crystallization Processes in Amorphous Silicon Films (en)
skos:notation	RIV/49777513:23640/10:00503315!RIV11-MSM-23640___
http://linked.open...avai/riv/aktivita	P S
http://linked.open...avai/riv/aktivity	P(1M06031), S
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Netrvalová, Marie Šutta, Pavol Prušáková, Lucie Vavruňková, Veronika
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	290825
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/10:00503315
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	re-crystallization; amorphous silicon (a-Si) (en)
http://linked.open.../riv/klicoveSlovo	amorphous silicon (a-Si) re-crystallization
http://linked.open...ontrolniKodProRIV	[62F65EC0F200]
http://linked.open...v/mistoKonaniAkce	Niš, Serbia
http://linked.open...i/riv/mistoVydani	Niš
http://linked.open...i/riv/nazevZdroje	Proceedings 27th International Conference on Microelectronics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Netrvalová, Marie Šutta, Pavol Prušáková, Lucie Müllerová, Jarmila Vavruňková, Veronika
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-01-01 (xsd:date)
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Electron Devices Society of the Institute of Electrical and Electronics Engineers
https://schema.org/isbn	978-1-4244-7198-0
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Study of Re-crystallization Processes in Amorphous Silicon Films Study of Re-crystallization Processes in Amorphous Silicon Films Study of Re-crystallization Processes in Amorphous Silicon Films

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