About: A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness

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Description	We report results obtained from optical absorption studies carried out on amorphous silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane plasma. The influence of the film thickness was studied on the two series of samples deposited from undiluted silane and under moderate hydrogen dilution of silane. Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band-gap energies Eg, the B factors of the Tauc plots, the iso-energy values E 04 (energy at which the absorption coefficient is equal to 10 4 cm-1). The results were correlated with volume fractions of the amorphous phase and voids and with the film thickness. We report results obtained from optical absorption studies carried out on amorphous silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane plasma. The influence of the film thickness was studied on the two series of samples deposited from undiluted silane and under moderate hydrogen dilution of silane. Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band-gap energies Eg, the B factors of the Tauc plots, the iso-energy values E 04 (energy at which the absorption coefficient is equal to 10 4 cm-1). The results were correlated with volume fractions of the amorphous phase and voids and with the film thickness. (en)
Title	A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness (en)
skos:prefLabel	A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness (en)
skos:notation	RIV/49777513:23640/10:00503192!RIV11-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...iv/cisloPeriodika	18
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Netrvalová, Marie Šutta, Pavol Prušáková, Lucie Vavruňková, Veronika
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	244991
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/10:00503192
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	thin-film silicon; hydrogenated amorphous silicon; thickness; absorption coefficient; optical band-gap energy (en)
http://linked.open.../riv/klicoveSlovo	thickness absorption coefficient hydrogenated amorphous silicon optical band-gap energy thin-film silicon
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[5ADAAA471AC0]
http://linked.open...i/riv/nazevZdroje	Applied Surface Science
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	256
http://linked.open...iv/tvurceVysledku	Netrvalová, Marie Šutta, Pavol Prušáková, Lucie Müllerová, Jarmila Vavruňková, Veronika
issn	0169-4332
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness

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