About: Study of ZnO layer growth by pulsed laser deposition from Zn and ZnO targets

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Description	The article deals with structural properties of ZnO thin layers prepared on Si (111) by pulsed laser deposition at different pressures (1?35 Pa) of ambient oxygen in the deposition chamber. The growth temperature was 400 °C and a pulsed Nd:YAG laser was used at a wavelength of 355 nm. Two parallel sets of samples deposited by ablation of different targets (a sintered ceramic pellet of ZnO and a pure metallic Zn target) were examined. The samples were characterized by different analytical methods: scanning electron microscope (SEM), secondary ion mass spectroscopy (SIMS), and X-ray diffraction (XRD). The prepared layers exhibited columnar structure and uniform preferred c-axis orientation. The results showed that the high quality of ZnO films fabricated from both targets is comparable, except for those obtained at low (1 Pa) pressures. The article deals with structural properties of ZnO thin layers prepared on Si (111) by pulsed laser deposition at different pressures (1?35 Pa) of ambient oxygen in the deposition chamber. The growth temperature was 400 °C and a pulsed Nd:YAG laser was used at a wavelength of 355 nm. Two parallel sets of samples deposited by ablation of different targets (a sintered ceramic pellet of ZnO and a pure metallic Zn target) were examined. The samples were characterized by different analytical methods: scanning electron microscope (SEM), secondary ion mass spectroscopy (SIMS), and X-ray diffraction (XRD). The prepared layers exhibited columnar structure and uniform preferred c-axis orientation. The results showed that the high quality of ZnO films fabricated from both targets is comparable, except for those obtained at low (1 Pa) pressures. (en)
Title	Study of ZnO layer growth by pulsed laser deposition from Zn and ZnO targets Study of ZnO layer growth by pulsed laser deposition from Zn and ZnO targets (en)
skos:prefLabel	Study of ZnO layer growth by pulsed laser deposition from Zn and ZnO targets Study of ZnO layer growth by pulsed laser deposition from Zn and ZnO targets (en)
skos:notation	RIV/49777513:23640/10:00503179!RIV11-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Netrvalová, Marie
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	290883
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/10:00503179
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ZnO; Pulsed laser deposition; ZnO target; Zn target, Thin film (en)
http://linked.open.../riv/klicoveSlovo	Pulsed laser deposition Thin film ZnO Zn target ZnO target
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[E8853DCC5020]
http://linked.open...i/riv/nazevZdroje	Vacuum
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	84
http://linked.open...iv/tvurceVysledku	Bruncko, Jaroslav Netrvalová, Marie Vincze, Andrej
http://linked.open...ain/vavai/riv/wos	000270625900042
issn	0042-207X
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Study of ZnO layer growth by pulsed laser deposition from Zn and ZnO targets Study of ZnO layer growth by pulsed laser deposition from Zn and ZnO targets Study of ZnO layer growth by pulsed laser deposition from Zn and ZnO targets

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