About: Effect of Doping on the Optical and Structural Properties of ZnO Thin Films Prepared by RF Diode Sputtering     Goto   Sponge   NotDistinct   Permalink

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  • Nitrogen-doped zinc oxide thin films (ZnO:N), and aluminum-nitrogen co-doped zinc oxide thin films (ZnO:Al:N), were deposited on Corning glass substrates by RF diode sputtering. The nitrogen (N2) content in the working gas varied from 0 to 100 %. XRD patterns revealed improving of the crystalline structure and stronger expressed c-axis preferential orientation of the aluminum-nitrogen co-doped films compared to nitrogen-doped films. The extimated crystallite size varied from 140 to 8 nm, depending on the N2 content. The transmittance spectra of ZnO:N and ZnO:Al:N flms were acquired over the wavelenght range of 200 { lambda { 1000 nm. All nitrogen-doped and Al-N2 co-doped films were colored as a result of the increase absorption near the band edge. Optical band gap (Eg) of the ZnO:N and ZnO:Al:N thin films decreases with increase of the N2 content in the working gas.
  • Nitrogen-doped zinc oxide thin films (ZnO:N), and aluminum-nitrogen co-doped zinc oxide thin films (ZnO:Al:N), were deposited on Corning glass substrates by RF diode sputtering. The nitrogen (N2) content in the working gas varied from 0 to 100 %. XRD patterns revealed improving of the crystalline structure and stronger expressed c-axis preferential orientation of the aluminum-nitrogen co-doped films compared to nitrogen-doped films. The extimated crystallite size varied from 140 to 8 nm, depending on the N2 content. The transmittance spectra of ZnO:N and ZnO:Al:N flms were acquired over the wavelenght range of 200 { lambda { 1000 nm. All nitrogen-doped and Al-N2 co-doped films were colored as a result of the increase absorption near the band edge. Optical band gap (Eg) of the ZnO:N and ZnO:Al:N thin films decreases with increase of the N2 content in the working gas. (en)
Title
  • Effect of Doping on the Optical and Structural Properties of ZnO Thin Films Prepared by RF Diode Sputtering
  • Effect of Doping on the Optical and Structural Properties of ZnO Thin Films Prepared by RF Diode Sputtering (en)
skos:prefLabel
  • Effect of Doping on the Optical and Structural Properties of ZnO Thin Films Prepared by RF Diode Sputtering
  • Effect of Doping on the Optical and Structural Properties of ZnO Thin Films Prepared by RF Diode Sputtering (en)
skos:notation
  • RIV/49777513:23640/09:43921798!RIV14-MSM-23640___
http://linked.open...avai/riv/aktivita
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  • P(1M06031)
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  • 312075
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  • RIV/49777513:23640/09:43921798
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  • doped ZnO, thin films (en)
http://linked.open.../riv/klicoveSlovo
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  • [CFF4D4249301]
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  • Vídeň
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  • ECS Transactions
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  • Novotný, Ivan
  • Netrvalová, Marie
  • Šutta, Pavol
  • Shtereva, Krasimira
  • Tvarožek, Vladimír
  • Pullmannová, Andrea
http://linked.open...vavai/riv/typAkce
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issn
  • 1938-5862
number of pages
http://bibframe.org/vocab/doi
  • 10.1149/1.3238208
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  • The electrochemical Society
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  • 978-1-56677-749-0
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  • 23640
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