About: Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Zinc oxide (ZnO) belongs to the wide energy band-gap II-VI binary semiconductors with many interesting physical properties. Non-stoichiometric ZnO is a native n-type semiconductor, and it is quite easy to increase its conductivity by its doping using appropriate element. Somewhat difficult is ZnO doping to p-type conductivity. The paper deals with the research of p-type conductivity of ZnO thin films doped by nitrogen and their physical properties. The films were prepared by RF diode sputter deposition from ceramic ZnO target with different argon/nitrogen working gas mixture. Zinc oxide (ZnO) belongs to the wide energy band-gap II-VI binary semiconductors with many interesting physical properties. Non-stoichiometric ZnO is a native n-type semiconductor, and it is quite easy to increase its conductivity by its doping using appropriate element. Somewhat difficult is ZnO doping to p-type conductivity. The paper deals with the research of p-type conductivity of ZnO thin films doped by nitrogen and their physical properties. The films were prepared by RF diode sputter deposition from ceramic ZnO target with different argon/nitrogen working gas mixture. (en)
Title	Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering (en)
skos:prefLabel	Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering (en)
skos:notation	RIV/49777513:23640/09:00502623!RIV10-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Šutta, Pavol
http://linked.open.../riv/druhVysledku	C - Kapitola v knize
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	314258
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/09:00502623
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Zinc oxide; p-type; sputtering (en)
http://linked.open.../riv/klicoveSlovo	sputtering p-type Zinc oxide
http://linked.open...ontrolniKodProRIV	[3D0A6125A050]
http://linked.open...i/riv/mistoVydani	Vukovar
http://linked.open...vEdiceCisloSvazku	;
http://linked.open...i/riv/nazevZdroje	Micro Electronic and Mechanical Systems
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...v/pocetStranKnihy	386 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Novotný, Ivan Šutta, Pavol Shtereva, Krasimira Kovac, Jaroslav Tvarozek, Vladimír
number of pages	24 (xsd:int)
http://purl.org/ne...btex#hasPublisher	In-Teh
https://schema.org/isbn	978-953-307-027-8
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering

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