About: Crystallization process of amorphous silicon films on glass monitored by in-situ XRD

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The crystallization process of amorphous silicon (a-Si) and hydrogenated a-Si (a-Si:H) films by solid phase crystallization (SPC) was monitored by in-situ X-ray diffraction (XRD). The expanding thermal plasma CVD (ETP CVD) and electron beam (EB) evaporation were used for the deposition of a-Si:H and a-Si films, respectively. The properties of the a-Si(:H) films were determined prior to crystallization by Fourier transform infrared spectroscopy, Raman spectroscopy and XRD. The crystallization process was investigated by using a high temperature chamber adapted for ?in situ? monitoring by XRD. These experiments were carried out at temperatures in the range of 580 to 620 °C and provided us with information about the transition of the amorphous to the polycrystalline state. The transition behavior differed for films with and without the presence of hydrogen. The presence of hydrogen affected the annealing time required for full crystallization. The phase transformation is slightly influenced by the presen The crystallization process of amorphous silicon (a-Si) and hydrogenated a-Si (a-Si:H) films by solid phase crystallization (SPC) was monitored by in-situ X-ray diffraction (XRD). The expanding thermal plasma CVD (ETP CVD) and electron beam (EB) evaporation were used for the deposition of a-Si:H and a-Si films, respectively. The properties of the a-Si(:H) films were determined prior to crystallization by Fourier transform infrared spectroscopy, Raman spectroscopy and XRD. The crystallization process was investigated by using a high temperature chamber adapted for ?in situ? monitoring by XRD. These experiments were carried out at temperatures in the range of 580 to 620 °C and provided us with information about the transition of the amorphous to the polycrystalline state. The transition behavior differed for films with and without the presence of hydrogen. The presence of hydrogen affected the annealing time required for full crystallization. The phase transformation is slightly influenced by the presen (en)
Title	Crystallization process of amorphous silicon films on glass monitored by in-situ XRD Crystallization process of amorphous silicon films on glass monitored by in-situ XRD (en)
skos:prefLabel	Crystallization process of amorphous silicon films on glass monitored by in-situ XRD Crystallization process of amorphous silicon films on glass monitored by in-situ XRD (en)
skos:notation	RIV/49777513:23640/09:00502543!RIV10-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Šutta, Pavol Vavruňková, Veronika
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	308624
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/09:00502543
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	x-ray diffraction; thin-film; crystallization (en)
http://linked.open.../riv/klicoveSlovo	crystallization x-ray diffraction thin-film
http://linked.open...ontrolniKodProRIV	[AB0D513A72C9]
http://linked.open...v/mistoKonaniAkce	Hamburg, Germany
http://linked.open...i/riv/mistoVydani	Munich
http://linked.open...i/riv/nazevZdroje	24th European Photovoltaic Solar Energy Conference and Exhibition
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Zeman, M. Šutta, Pavol Vavruňková, Veronika Westra, J. M. van Swaaij, R.A.C.M.M. Gall, S. Sontheimer, T.
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2009-09-25 (xsd:date)
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	WIP - Renewable Energies
https://schema.org/isbn	3-936338-25-6
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Crystallization process of amorphous silicon films on glass monitored by in-situ XRD Crystallization process of amorphous silicon films on glass monitored by in-situ XRD Crystallization process of amorphous silicon films on glass monitored by in-situ XRD Crystallization process of amorphous silicon films on glass monitored by in-situ XRD

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