About: Structural properties of amorphous silicon prepared from hydrogen-diluted silane

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Description	A systematic structural analysis was carried out on amorphous silicon films prepared from hydrogen-diluted silane using plasma-enhanced chemical vapor deposition. Hydrogen dilution of silane during the growth of a-Si:H absorber layers is used to suppress light-induced degradation of a-Si:H solar cells. Transmission electron microscopy (TEM) shows that for higher hydrogen dilution ratios the growth of films becomes strongly inhomogeneous and the transition from amorphous to microcrystalline phase occurs at a smaller thickness. A detailed X-ray diffraction (XRD) analysis of the amorphous films reveals that the strongest peak in the XRD patterns is located around 27.5° and corresponds to the signal from the ordered domains of tetragonal silicon hydride and not from cubic silicon crystallites. The full width at half maximum of this peak narrows from 5.1° to 4.8° as the ratio of hydrogen to silane flow (R) increases to 20 and does not change significantly for higher hydrogen dilutions. The presence of sili A systematic structural analysis was carried out on amorphous silicon films prepared from hydrogen-diluted silane using plasma-enhanced chemical vapor deposition. Hydrogen dilution of silane during the growth of a-Si:H absorber layers is used to suppress light-induced degradation of a-Si:H solar cells. Transmission electron microscopy (TEM) shows that for higher hydrogen dilution ratios the growth of films becomes strongly inhomogeneous and the transition from amorphous to microcrystalline phase occurs at a smaller thickness. A detailed X-ray diffraction (XRD) analysis of the amorphous films reveals that the strongest peak in the XRD patterns is located around 27.5° and corresponds to the signal from the ordered domains of tetragonal silicon hydride and not from cubic silicon crystallites. The full width at half maximum of this peak narrows from 5.1° to 4.8° as the ratio of hydrogen to silane flow (R) increases to 20 and does not change significantly for higher hydrogen dilutions. The presence of sili (en)
Title	Structural properties of amorphous silicon prepared from hydrogen-diluted silane Structural properties of amorphous silicon prepared from hydrogen-diluted silane (en)
skos:prefLabel	Structural properties of amorphous silicon prepared from hydrogen-diluted silane Structural properties of amorphous silicon prepared from hydrogen-diluted silane (en)
skos:notation	RIV/49777513:23640/09:00502067!RIV10-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...iv/cisloPeriodika	28-30
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Šutta, Pavol
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	344156
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/09:00502067
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	hydrogen-diluted amorphous silicon; X-ray diffraction; structural analysis; solar cell (en)
http://linked.open.../riv/klicoveSlovo	X-ray diffraction solar cell structural analysis hydrogen-diluted amorphous silicon
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[CE71A0FC5679]
http://linked.open...i/riv/nazevZdroje	Philosophical Magazine
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	89
http://linked.open...iv/tvurceVysledku	Šutta, Pavol Zeman, Miro Van Elzakker, Gijs Tichelaar, Frans
http://linked.open...ain/vavai/riv/wos	000271871300003
issn	1478-6435
number of pages	14 (xsd:int)
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Structural properties of amorphous silicon prepared from hydrogen-diluted silane Structural properties of amorphous silicon prepared from hydrogen-diluted silane Structural properties of amorphous silicon prepared from hydrogen-diluted silane Structural properties of amorphous silicon prepared from hydrogen-diluted silane

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