About: Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation

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About: Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	This paper deals with the structural and optical properties of the polycrystalline silicon films initially deposited in amorphous state by electron beam evaporation technology on a Corning glass and consequently thermally re-crystallized from solid phase. The re-crystallization process was ?in situ? monitored by X-ray diffraction using an evacuated high temperature chamber at temperatures from 590°C to 650°C. Optical properties of the films carried out from the optical spectrophotometry recorded in a visible range of electromagnetic spectra were then confronted with the micro-structure parameters of the films. Relationships between the crystalline/amorphous state, crystallite size and optical band-gaps, spectral refractive indexes and spectral extinction coefficients are clearly demonstrated. This paper deals with the structural and optical properties of the polycrystalline silicon films initially deposited in amorphous state by electron beam evaporation technology on a Corning glass and consequently thermally re-crystallized from solid phase. The re-crystallization process was ?in situ? monitored by X-ray diffraction using an evacuated high temperature chamber at temperatures from 590°C to 650°C. Optical properties of the films carried out from the optical spectrophotometry recorded in a visible range of electromagnetic spectra were then confronted with the micro-structure parameters of the films. Relationships between the crystalline/amorphous state, crystallite size and optical band-gaps, spectral refractive indexes and spectral extinction coefficients are clearly demonstrated. (en)
Title	Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation (en)
skos:prefLabel	Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation (en)
skos:notation	RIV/49777513:23640/09:00501778!RIV10-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Šutta, Pavol Vavruňková, Veronika
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	331827
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/09:00501778
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	optical properties; a-Si thin films; annealing (en)
http://linked.open.../riv/klicoveSlovo	a-Si thin films annealing optical properties
http://linked.open...odStatuVydavatele	SK - Slovenská republika
http://linked.open...ontrolniKodProRIV	[4C12677F3F6E]
http://linked.open...i/riv/nazevZdroje	Journal of Electrical Engineering
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	60
http://linked.open...iv/tvurceVysledku	Netrvalová, Marie Šutta, Pavol Müllerová, Jarmila Vavruňková, Veronika
http://linked.open...ain/vavai/riv/wos	000271846100008
issn	1335-3632
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation

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