About: Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We report results obtained from measurements of optical transmittance spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane diluted with hydrogen. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (μc-Si:H). Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band gap energy, the B factor of the Tauc plots, E04 (energy at which the absorption coefficient is equal to 104 cm-1), and the Urbach energy as a function of the hydrogen dilution. The results were correlated with microstructure, namely volume fractions of the amorphous and crystalline phase with voids, and with the grain size. We report results obtained from measurements of optical transmittance spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane diluted with hydrogen. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (μc-Si:H). Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band gap energy, the B factor of the Tauc plots, E04 (energy at which the absorption coefficient is equal to 104 cm-1), and the Urbach energy as a function of the hydrogen dilution. The results were correlated with microstructure, namely volume fractions of the amorphous and crystalline phase with voids, and with the grain size. (en)
Title	Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects (en)
skos:prefLabel	Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects (en)
skos:notation	RIV/49777513:23640/09:00501545!RIV10-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Šutta, Pavol Vavruňková, Veronika
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	331799
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/09:00501545
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	thin-film silicon; absorption coefficient; optical band gap energy; volume fraction (en)
http://linked.open.../riv/klicoveSlovo	optical band gap energy volume fraction absorption coefficient thin-film silicon
http://linked.open...odStatuVydavatele	PL - Polská republika
http://linked.open...ontrolniKodProRIV	[09C57F12CDE4]
http://linked.open...i/riv/nazevZdroje	Central European Journal of Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	7
http://linked.open...iv/tvurceVysledku	Šutta, Pavol Müllerová, Jarmila Vavruňková, Veronika
http://linked.open...ain/vavai/riv/wos	000265522000019
issn	1895-1082
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects

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