About: Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films

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Description	We report results obtained from measurements of UV Vis, FTIR and Raman spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. Spectral refractive indices, extinction coefficients, optical band gap energies, hydrogen content, the microstructure factor, and grain size were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (c-Si:H). With increasing dilution Si:H films become mixed-phase materials with changing volume fractions of crystalline and amorphous phases and voids. The optical band gap energies were determined from transmittance spectra. The grain size was determined from Raman spectra and the contribution of small and large grains was detected. We report results obtained from measurements of UV Vis, FTIR and Raman spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. Spectral refractive indices, extinction coefficients, optical band gap energies, hydrogen content, the microstructure factor, and grain size were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (c-Si:H). With increasing dilution Si:H films become mixed-phase materials with changing volume fractions of crystalline and amorphous phases and voids. The optical band gap energies were determined from transmittance spectra. The grain size was determined from Raman spectra and the contribution of small and large grains was detected. (en)
Title	Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films (en)
skos:prefLabel	Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films (en)
skos:notation	RIV/49777513:23640/08:43898285!RIV12-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Šutta, Pavol Vavruňková, Veronika
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	379360
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/08:43898285
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	thin-film silicon, refractive index, absorption, optical band gap, microstructure factor, grain size, volume fraction (en)
http://linked.open.../riv/klicoveSlovo	grain size optical band gap absorption volume fraction refractive index thin-film silicon microstructure factor
http://linked.open...ontrolniKodProRIV	[B9272FC25789]
http://linked.open...v/mistoKonaniAkce	Polanica Zdrój
http://linked.open...i/riv/mistoVydani	S.l.
http://linked.open...i/riv/nazevZdroje	Proceedings SPIE
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2008
http://linked.open...iv/tvurceVysledku	Šutta, Pavol Müllerová, Jarmila Vavruňková, Veronika Srnánek, Rudolf
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2008-09-08 (xsd:date)
issn	0277-786X
number of pages	8 (xsd:int)
http://bibframe.org/vocab/doi	10.1117/12.822348
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	978-80-8070-709-5
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films

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