About: Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen

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Description	We report results obtained from FTIR and TEM measurements carried out on silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. The hydrogen content, the microstructure factor, the mass density and the volume per Si-H vibrating dipoles were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (mc-Si:H). With increasing dilution the transition from amorphous to microcrystalline phase appears faster and the average mass density of the films decreases. The mc-Si:H films are mixed-phase void-rich materials with changing triphasic volume fractions of crystalline and amorphous phases and voids. Different bonding configurations of vibrating Si-H dipoles were observed in the a-Si:H and mc-Si:H. We report results obtained from FTIR and TEM measurements carried out on silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. The hydrogen content, the microstructure factor, the mass density and the volume per Si-H vibrating dipoles were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (mc-Si:H). With increasing dilution the transition from amorphous to microcrystalline phase appears faster and the average mass density of the films decreases. The mc-Si:H films are mixed-phase void-rich materials with changing triphasic volume fractions of crystalline and amorphous phases and voids. Different bonding configurations of vibrating Si-H dipoles were observed in the a-Si:H and mc-Si:H. (en)
Title	Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen (en)
skos:prefLabel	Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen (en)
skos:notation	RIV/49777513:23640/08:00501248!RIV11-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...iv/cisloPeriodika	12
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Šutta, Pavol
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	379356
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/08:00501248
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	thin-film silicon; amorphous phase; microcrystalline phase; hydrogen (en)
http://linked.open.../riv/klicoveSlovo	amorphous phase hydrogen thin-film silicon microcrystalline phase
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[953A7593137F]
http://linked.open...i/riv/nazevZdroje	Applied Surface Science
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2008
http://linked.open...v/svazekPeriodika	254
http://linked.open...iv/tvurceVysledku	Šutta, Pavol Müllerová, Jarmila Zeman, Miro Van Elzakker, Gijs Mikula, M.
http://linked.open...ain/vavai/riv/wos	000254243900015
issn	0169-4332
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen

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