About: Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • We report results obtained from FTIR and TEM measurements carried out on silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. The hydrogen content, the microstructure factor, the mass density and the volume per Si-H vibrating dipoles were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (mc-Si:H). With increasing dilution the transition from amorphous to microcrystalline phase appears faster and the average mass density of the films decreases. The mc-Si:H films are mixed-phase void-rich materials with changing triphasic volume fractions of crystalline and amorphous phases and voids. Different bonding configurations of vibrating Si-H dipoles were observed in the a-Si:H and mc-Si:H.
  • We report results obtained from FTIR and TEM measurements carried out on silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. The hydrogen content, the microstructure factor, the mass density and the volume per Si-H vibrating dipoles were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (mc-Si:H). With increasing dilution the transition from amorphous to microcrystalline phase appears faster and the average mass density of the films decreases. The mc-Si:H films are mixed-phase void-rich materials with changing triphasic volume fractions of crystalline and amorphous phases and voids. Different bonding configurations of vibrating Si-H dipoles were observed in the a-Si:H and mc-Si:H. (en)
Title
  • Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen
  • Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen (en)
skos:prefLabel
  • Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen
  • Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen (en)
skos:notation
  • RIV/49777513:23640/08:00501248!RIV11-MSM-23640___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1M06031)
http://linked.open...iv/cisloPeriodika
  • 12
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 379356
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23640/08:00501248
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • thin-film silicon; amorphous phase; microcrystalline phase; hydrogen (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [953A7593137F]
http://linked.open...i/riv/nazevZdroje
  • Applied Surface Science
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 254
http://linked.open...iv/tvurceVysledku
  • Šutta, Pavol
  • Müllerová, Jarmila
  • Zeman, Miro
  • Van Elzakker, Gijs
  • Mikula, M.
http://linked.open...ain/vavai/riv/wos
  • 000254243900015
issn
  • 0169-4332
number of pages
http://localhost/t...ganizacniJednotka
  • 23640
is http://linked.open...avai/riv/vysledek of
Faceted Search & Find service v1.16.116 as of Feb 22 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3239 as of Feb 22 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 67 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software