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  • The goal of this paper is to quantify the amount of Aluminium present in ZnO:Al film samples by analyzing the film using EPMA (Electron Probe Microanalysis). Influences of the substrate components and the effect of varying energy levels of the primary beam are shown. The possibility of measuring films' thicknesses by using EPMA is also considered.
  • The goal of this paper is to quantify the amount of Aluminium present in ZnO:Al film samples by analyzing the film using EPMA (Electron Probe Microanalysis). Influences of the substrate components and the effect of varying energy levels of the primary beam are shown. The possibility of measuring films' thicknesses by using EPMA is also considered. (en)
Title
  • Problems in Aluminium Quantitative Determination in ZnO:Al Films by Electron Microprobe
  • Problems in Aluminium Quantitative Determination in ZnO:Al Films by Electron Microprobe (en)
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  • Problems in Aluminium Quantitative Determination in ZnO:Al Films by Electron Microprobe
  • Problems in Aluminium Quantitative Determination in ZnO:Al Films by Electron Microprobe (en)
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  • RIV/49777513:23640/08:00501188!RIV12-MSM-23640___
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  • P(1M06031)
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  • 389903
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  • RIV/49777513:23640/08:00501188
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  • EDX.; Electron Beam; ZnO:Al; EPMA; Films; Thin films (en)
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  • [B839F054DB59]
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  • Liptovský Ján
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  • Bratislava
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  • Proceedings of the 14th comference on Applied Physics of Condensed Matter
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  • Medlín, Rostislav
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number of pages
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  • Slovenská Technická Univerzita v Bratislave
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  • 978-80-227-2902-4
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  • 23640
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