About: The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films

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About: The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	V našem experimentu jsme se zaměřili na vrstvy oxidu zinku dopovaného hliníkem vytvářené RF naprašováním na skleněný substrát. Oxid zinku je jedním z polovodičů vhodných k použití ve fotovoltaice k vytvoření vrchní elektrody či zadního reflektoru solárních článků. Optické a elektrické vlastnosti jako nízká rezistivita a vysoká propustnost jsou pro tyto aplikace důležitými vlastnostmi tohoto materiálu. Proto byl studován vliv depozičního procesu na strukturní a elektrické vlastnosti vytvářených vrstev. (cs) We focused our experiment on the aluminium-doped zinc oxide thin films prepared by RF sputtering onto the glass substrate. ZnO is one of the metal oxide semiconductors suitable for use in photovoltaic as the top electrode or back reflector in thin film solar cells, where it´s optical and electrical properties, such as low resistivity and high transparency are very important. Therefore all above the ingluence of deposition process on structure and electrical properties was investigated. We focused our experiment on the aluminium-doped zinc oxide thin films prepared by RF sputtering onto the glass substrate. ZnO is one of the metal oxide semiconductors suitable for use in photovoltaic as the top electrode or back reflector in thin film solar cells, where it´s optical and electrical properties, such as low resistivity and high transparency are very important. Therefore all above the ingluence of deposition process on structure and electrical properties was investigated. (en)
Title	The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films (en) Vliv procesu depozice na strukturní a elektrické vlastnosti tenkých vrstev oxidu zinku dopovaného hliníkem (cs)
skos:prefLabel	The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films (en) Vliv procesu depozice na strukturní a elektrické vlastnosti tenkých vrstev oxidu zinku dopovaného hliníkem (cs)
skos:notation	RIV/49777513:23640/08:00500494!RIV09-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...vai/riv/dodaniDat	2009
http://linked.open...aciTvurceVysledku	Netrvalová, Marie Šutta, Pavol Prušáková, Lucie
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	372291
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/08:00500494
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ZnO:Al; RF sputtering; resistivity; transparency; thin films (en)
http://linked.open.../riv/klicoveSlovo	transparency resistivity thin films ZnO:Al RF sputtering
http://linked.open...ontrolniKodProRIV	[3F0711591DBC]
http://linked.open...v/mistoKonaniAkce	Liptovský Ján
http://linked.open...i/riv/mistoVydani	Bratislava
http://linked.open...i/riv/nazevZdroje	Proceedings of the 14th International Conference on Applied physics of condensed matter
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2008
http://linked.open...iv/tvurceVysledku	Netrvalová, Marie Šutta, Pavol Prušáková, Lucie
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2008-06-27 (xsd:date)
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Slovenská technická univerzita v Bratislave
https://schema.org/isbn	978-80-227-2902-4
http://localhost/t...ganizacniJednotka	23640
is http://linked.open...avai/riv/vysledek of	The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films

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