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  • High transparent and conductive ZnO:Al thin film were prepared by RF diode sputtering from ZnO + 2 wt. % Al2O3 target on Corning glass substrates. The RF power and the substrate temperature modified their structure and surface morfology, electrical and optical parameters. The XRD patterns reveal a preferential c-axis orientation. The developed ZnO:Ale have a low electrical resistivity and high optical transmittance in the visible region. The direct optical band gap increases with the increasing carrier concentration.
  • High transparent and conductive ZnO:Al thin film were prepared by RF diode sputtering from ZnO + 2 wt. % Al2O3 target on Corning glass substrates. The RF power and the substrate temperature modified their structure and surface morfology, electrical and optical parameters. The XRD patterns reveal a preferential c-axis orientation. The developed ZnO:Ale have a low electrical resistivity and high optical transmittance in the visible region. The direct optical band gap increases with the increasing carrier concentration. (en)
Title
  • Transparent and conductive ZnO:Al prepared by Rf diode sputtering
  • Transparent and conductive ZnO:Al prepared by Rf diode sputtering (en)
skos:prefLabel
  • Transparent and conductive ZnO:Al prepared by Rf diode sputtering
  • Transparent and conductive ZnO:Al prepared by Rf diode sputtering (en)
skos:notation
  • RIV/49777513:23640/08:00500271!RIV10-MSM-23640___
http://linked.open...avai/riv/aktivita
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  • P(1M06031)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 400482
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23640/08:00500271
http://linked.open...riv/jazykVysledku
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  • ZnO:Al; structure; optical properties; electrical properties (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [A48D2043C80C]
http://linked.open...v/mistoKonaniAkce
  • Stockholm, Sweden
http://linked.open...i/riv/mistoVydani
  • BRISTOL
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  • Journal of Physics: Conference Series
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  • Novotný, Ivan
  • Netrvalová, Marie
  • Šutta, Pavol
  • Flickyngerová, Soňa
  • Tvarožek, Vladimír
  • Shtereva, K.
http://linked.open...vavai/riv/typAkce
http://linked.open...ain/vavai/riv/wos
  • 000275655200299
http://linked.open.../riv/zahajeniAkce
issn
  • 1742-6588
number of pages
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  • IOP PUBLISHING LTD
http://localhost/t...ganizacniJednotka
  • 23640
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