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Description
  • Tento příspěvek je věnovaný vyšetřování strukturních a optických vlastností tenkých vrstev a-Si:H s různou tloušťkou v jednovrstvých a multivrstvých strukturách deponovaných metodou PECVD na skleněné a Si/SiO2 substráty se zředěním 30. (cs)
  • This paper is devoted to the investigation of structural and optical properties of a-Si:H thin films different in thickness, ordered in single and multi-layered structures deposited by PE CVD technique on corning glass 1733 and Si/SiO2 substrates with dilution 30.
  • This paper is devoted to the investigation of structural and optical properties of a-Si:H thin films different in thickness, ordered in single and multi-layered structures deposited by PE CVD technique on corning glass 1733 and Si/SiO2 substrates with dilution 30. (en)
Title
  • Structural and optical properties of a-Si:H thin films in multilayered structures
  • Strukturní a optické vlastnosti tenkých vrstev a-Si:H v multivrstvých strukturách (cs)
  • Structural and optical properties of a-Si:H thin films in multilayered structures (en)
skos:prefLabel
  • Structural and optical properties of a-Si:H thin films in multilayered structures
  • Strukturní a optické vlastnosti tenkých vrstev a-Si:H v multivrstvých strukturách (cs)
  • Structural and optical properties of a-Si:H thin films in multilayered structures (en)
skos:notation
  • RIV/49777513:23640/07:00000044!RIV08-MSM-23640___
http://linked.open.../vavai/riv/strany
  • 109-112
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1M06031)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 452839
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23640/07:00000044
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • multi-layered structures; PECVD; dilution; a-Si:H (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [581D4373F3B3]
http://linked.open...v/mistoKonaniAkce
  • Bystrá, Slovak Republic
http://linked.open...i/riv/mistoVydani
  • Žilina
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 13th International Conference on Applied Physics of Condensed Matter
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Netrvalová, Marie
  • Vavruňková, Veronika
  • van Elzakker, Gijs
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • Žilinská univerzita v Žiline
https://schema.org/isbn
  • 978-80-8070-709-5
http://localhost/t...ganizacniJednotka
  • 23640
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