About: Pulsed reactive magnetron sputtering of high-temperature Si-B-C-N films with high optical transparency

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Pulsed reactive magnetron sputtering of high-temperature Si-B-C-N films with high optical transparency Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://dx.doi.org/10.1016/j.surfcoat.2013.03.033
Description	Multifunctional Si-B-C-N films with exceptionally high thermal stability are becoming increasingly attractive because of their potential applications in coating technologies, and in high-temperature electronics and optoelectronics. In the present work, amorphous Si-B-C-N films were deposited onto SiC and Cu floating substrates using pulsed dc magnetron co-sputtering of a single boron carbide (25%)-silicon (75 %) target in an argon-nitrogen gas mixture. High-quality defect-free films with smooth surfaces (average roughness of 4 nm) were produced. The films exhibited a hardness of 22 GPa, an effective Young's modulus of 170 GPa and an elastic recovery of 75%. The oxidation resistance of the Si-B-C-N films in air was found to be very high up to 1600 °C. Annealing of the as-deposited films in He to 1400 °C led to a slight decrease in the refractive index from 1.92 to 1.91 and to an increase in the extinction coefficient from 0.0003 to 0.003 (both at the wavelength of 550 nm). Multifunctional Si-B-C-N films with exceptionally high thermal stability are becoming increasingly attractive because of their potential applications in coating technologies, and in high-temperature electronics and optoelectronics. In the present work, amorphous Si-B-C-N films were deposited onto SiC and Cu floating substrates using pulsed dc magnetron co-sputtering of a single boron carbide (25%)-silicon (75 %) target in an argon-nitrogen gas mixture. High-quality defect-free films with smooth surfaces (average roughness of 4 nm) were produced. The films exhibited a hardness of 22 GPa, an effective Young's modulus of 170 GPa and an elastic recovery of 75%. The oxidation resistance of the Si-B-C-N films in air was found to be very high up to 1600 °C. Annealing of the as-deposited films in He to 1400 °C led to a slight decrease in the refractive index from 1.92 to 1.91 and to an increase in the extinction coefficient from 0.0003 to 0.003 (both at the wavelength of 550 nm). (en)
Title	Pulsed reactive magnetron sputtering of high-temperature Si-B-C-N films with high optical transparency Pulsed reactive magnetron sputtering of high-temperature Si-B-C-N films with high optical transparency (en)
skos:prefLabel	Pulsed reactive magnetron sputtering of high-temperature Si-B-C-N films with high optical transparency Pulsed reactive magnetron sputtering of high-temperature Si-B-C-N films with high optical transparency (en)
skos:notation	RIV/49777513:23520/13:43918474!RIV14-GA0-23520___
http://linked.open...avai/predkladatel	Fakulta aplikovaných věd
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GAP108/12/0393)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Zeman, Petr Calta, Pavel Houška, Jiří Kohout, Jiří Vlček, Jaroslav Čerstvý, Radomír Steidl, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta aplikovaných věd
http://linked.open...dnocenehoVysledku	101030
http://linked.open...ai/riv/idVysledku	RIV/49777513:23520/13:43918474
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Defect-free surfaces; High optical transparency; High thermal stability; Pulsed magnetron sputtering; Si-B-C-N films (en)
http://linked.open.../riv/klicoveSlovo	Defect-free surfaces High optical transparency High thermal stability Pulsed magnetron sputtering Si-B-C-N films
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[C294726CFA67]
http://linked.open...i/riv/nazevZdroje	Surface & Coatings Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	7 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Hard nanocomposite coatings with enhanced toughness and unique properties
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	226
http://linked.open...iv/tvurceVysledku	Houška, Jiří Zeman, Petr Vlček, Jaroslav Calta, Pavel Čerstvý, Radomír Steidl, Petr Kohout, Jiří
http://linked.open...ain/vavai/riv/wos	000320415400006
issn	0257-8972
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.surfcoat.2013.03.033
http://localhost/t...ganizacniJednotka	23520

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software