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| Description
| - The paper reports on the structure, mechanical and optical properties of sputtered Zr-Al-O films. The Zr-Al-O films with different Zr/Al ratio were prepared by a reactive sputtering using ac pulse dual magnetrons. The magnetrons were equipped with a target composed of Al plate fixed to the magnetron cathode by a Zr fixing ring. The content of Al in the Zr-Al-O film was controlled by inner diameter of Zr ring. It makes possible to control effectively the structure of the Zr-Al-O film determined by a mixture of the crystalline zirconium dioxide phase and the amorphous alumina phase. The effect of Al content on the structure, mechanical and optical properties of the Zr-Al-O film is investigated in detail. It was found that (i) the Zr-Al-O films with value of Zr/Al less than one are X-ray amorphous and exhibit low hardness, an effective Young's modulus resulting in a low hardness to effective Young's modulus ratio and low elastic recovery and (ii) the Zr-Al-O films with value of Zr/Al higher than one are crystalline and exhibit high hardness, an effective Young's modulus satisfying a high hardness to effective Young's modulus ratio, high value of elastic recovery and strongly enhanced resistance to cracking during bending even for thick films up to 5 micrometers.
- The paper reports on the structure, mechanical and optical properties of sputtered Zr-Al-O films. The Zr-Al-O films with different Zr/Al ratio were prepared by a reactive sputtering using ac pulse dual magnetrons. The magnetrons were equipped with a target composed of Al plate fixed to the magnetron cathode by a Zr fixing ring. The content of Al in the Zr-Al-O film was controlled by inner diameter of Zr ring. It makes possible to control effectively the structure of the Zr-Al-O film determined by a mixture of the crystalline zirconium dioxide phase and the amorphous alumina phase. The effect of Al content on the structure, mechanical and optical properties of the Zr-Al-O film is investigated in detail. It was found that (i) the Zr-Al-O films with value of Zr/Al less than one are X-ray amorphous and exhibit low hardness, an effective Young's modulus resulting in a low hardness to effective Young's modulus ratio and low elastic recovery and (ii) the Zr-Al-O films with value of Zr/Al higher than one are crystalline and exhibit high hardness, an effective Young's modulus satisfying a high hardness to effective Young's modulus ratio, high value of elastic recovery and strongly enhanced resistance to cracking during bending even for thick films up to 5 micrometers. (en)
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| Title
| - The effect of addition of Al in zirkonium dioxide thin film on its resistance to cracking
- The effect of addition of Al in zirkonium dioxide thin film on its resistance to cracking (en)
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| skos:prefLabel
| - The effect of addition of Al in zirkonium dioxide thin film on its resistance to cracking
- The effect of addition of Al in zirkonium dioxide thin film on its resistance to cracking (en)
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| skos:notation
| - RIV/49777513:23520/12:43915535!RIV13-GA0-23520___
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| http://linked.open...avai/predkladatel
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
| - P(ED1.1.00/02.0090), P(GAP108/12/0393)
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| http://linked.open...iv/cisloPeriodika
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| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23520/12:43915535
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| http://linked.open...riv/jazykVysledku
| |
| http://linked.open.../riv/klicovaSlova
| - Reactive magnetron sputtering; Optical properties; Resistance to cracking; Mechanical properties; Structure; Zr-Al-O film (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...odStatuVydavatele
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...i/riv/nazevZdroje
| - Surface and Coatings Technology
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| http://linked.open...in/vavai/riv/obor
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| http://linked.open...ichTvurcuVysledku
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| http://linked.open...cetTvurcuVysledku
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| http://linked.open...vavai/riv/projekt
| |
| http://linked.open...UplatneniVysledku
| |
| http://linked.open...v/svazekPeriodika
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| http://linked.open...iv/tvurceVysledku
| - Musil, Jindřich
- Čerstvý, Radomír
- Mori, Takanori
- Sklenka, Josef
- Suzuki, Tetsuya
- Takahashi, Mari
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| issn
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| number of pages
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| http://bibframe.org/vocab/doi
| - 10.1016/j.surfcoat.2012.07.017
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| http://localhost/t...ganizacniJednotka
| |
| is http://linked.open...avai/riv/vysledek
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