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Description
| - This article reports on the d.c. reactive magnetron sputter deposition of W-Si-N films with a high content of Si and their physical and mechanical properties. Films were characterized by XRD, EDX, microhardness, elastic recovery, resistance to plastic deformation, macrostress and thermogravimetry.
- This article reports on the d.c. reactive magnetron sputter deposition of W-Si-N films with a high content of Si and their physical and mechanical properties. Films were characterized by XRD, EDX, microhardness, elastic recovery, resistance to plastic deformation, macrostress and thermogravimetry. (en)
- Článek se zabývá vlivem obsahu Si3N4 na mechnaické vlastnosti, vznesené pnutí a oxidační odolnost W-Si-N vrstev. Bylo prokázáno, že zvýšení obsahu Si3N4 fáze vede k změně struktury z krystalické na amorfní, zvýšení mikrotvrdosti, zvýšení odolnosti, saturaci zbytkového pnutí. (cs)
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Title
| - Properties of reactively sputtered W-Si-N films
- Properties of reactively sputtered W-Si-N films (en)
- Vlastnosti reaktivně naprašovaných W-Si-N vrstev (cs)
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skos:prefLabel
| - Properties of reactively sputtered W-Si-N films
- Properties of reactively sputtered W-Si-N films (en)
- Vlastnosti reaktivně naprašovaných W-Si-N vrstev (cs)
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skos:notation
| - RIV/49777513:23520/06:00000292!RIV07-MSM-23520___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(ME 529), Z(MSM 235200002)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23520/06:00000292
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - W-Si-N films; high Si3N4 content; structure; mechanical properties; thermal stability; oxidation resistance; d.c. reactive magnetron sputtering (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Surface and Coatings Technology
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Musil, Jindřich
- Zeman, Petr
- Daniel, Rostislav
- Soldán, Jan
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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is http://linked.open...avai/riv/vysledek
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