About: Structure and properties of magnetron sputtered Zr-Si-N films with a high Si content     Goto   Sponge   NotDistinct   Permalink

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Description
  • Článek se zabývá systematickým zkoumáním závislostí struktury, prvkového složení, mechanických vlastností a oxidační odolnosti vrstev Zr-Si-N s vysokým obsahem Si na depozičních parametrech. Vrstvy byly deponovány magnetronovým naprašováním z keramického (cs)
  • The Zr-Si-N films were deposited using an unbalanced dc reactive magnetron sputtering of the alloyed ZrSi2 target in a mixture of argon and nitrogen onto steel and silicon substrates. This article reports on a systematic investigation of depences of the
  • The Zr-Si-N films were deposited using an unbalanced dc reactive magnetron sputtering of the alloyed ZrSi2 target in a mixture of argon and nitrogen onto steel and silicon substrates. This article reports on a systematic investigation of depences of the (en)
Title
  • Structure and properties of magnetron sputtered Zr-Si-N films with a high Si content
  • Struktura a vlastnosti magnetronově naprašovaných vrstev Zr-Si-N s vysokým obsahem křemíku (cs)
  • Structure and properties of magnetron sputtered Zr-Si-N films with a high Si content (en)
skos:prefLabel
  • Structure and properties of magnetron sputtered Zr-Si-N films with a high Si content
  • Struktura a vlastnosti magnetronově naprašovaných vrstev Zr-Si-N s vysokým obsahem křemíku (cs)
  • Structure and properties of magnetron sputtered Zr-Si-N films with a high Si content (en)
skos:notation
  • RIV/49777513:23520/05:00000250!RIV06-GA0-23520___
http://linked.open.../vavai/riv/strany
  • 238-247
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GP106/03/D009), P(ME 529), Z(MSM 235200002)
http://linked.open...iv/cisloPeriodika
  • 0
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 544960
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/05:00000250
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Zr-Si-N films; high Si content; structure; mechanical properties; oxidation resistance; dc reactive magnetron sputtering (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [FD1378ED49CC]
http://linked.open...i/riv/nazevZdroje
  • Thin Solid Films
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 478
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Zeman, Petr
  • Daniel, Rostislav
  • Takai, Osamu
http://linked.open...n/vavai/riv/zamer
issn
  • 0040-6090
number of pages
http://localhost/t...ganizacniJednotka
  • 23520
is http://linked.open...avai/riv/vysledek of
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