About: Physical and mechanical properties of sputtered Ta-Si-N films with a high content of Si     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • This article reports on ternary Ta-Si-N films with a high content of Si sputtered from an alloyed TaSi2 target using an unbalanced dc magnetron. The films were deposited under the following conditions: magnetron discharge current Id=1 and 2A, negative s ubstrate bias Us, ranging from Ufl to -500V, substrate ion current density is=0.5 and 1mA/cm2, substrate temperature Ts ranging from 200 to 1000oC, substrate-to-terget distance ds-t=60mm, partial pressure of nitrogen pN2 ranging from 0 to 0.7 Pa and two values of a total pressure pT=PAr+pN2=0.5 and 0.7 Pa.
  • This article reports on ternary Ta-Si-N films with a high content of Si sputtered from an alloyed TaSi2 target using an unbalanced dc magnetron. The films were deposited under the following conditions: magnetron discharge current Id=1 and 2A, negative s ubstrate bias Us, ranging from Ufl to -500V, substrate ion current density is=0.5 and 1mA/cm2, substrate temperature Ts ranging from 200 to 1000oC, substrate-to-terget distance ds-t=60mm, partial pressure of nitrogen pN2 ranging from 0 to 0.7 Pa and two values of a total pressure pT=PAr+pN2=0.5 and 0.7 Pa. (en)
Title
  • Physical and mechanical properties of sputtered Ta-Si-N films with a high content of Si
  • Physical and mechanical properties of sputtered Ta-Si-N films with a high content of Si (en)
skos:prefLabel
  • Physical and mechanical properties of sputtered Ta-Si-N films with a high content of Si
  • Physical and mechanical properties of sputtered Ta-Si-N films with a high content of Si (en)
skos:notation
  • RIV/49777513:23520/03:00000234!RIV/2004/MSM/235204/N
http://linked.open.../vavai/riv/strany
  • 51-57
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ME 529), Z(MSM 235200002)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 620879
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/03:00000234
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Ta-Si-N;deposition rate;electrical resistivity;macrostress;oxidation resistance (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [F4DEAD7C0827]
http://linked.open...v/mistoKonaniAkce
  • Vienna
http://linked.open...i/riv/mistoVydani
  • Vienna
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the International Workshop on Designing Interfacial Structures in Advanced Materials and their Joints
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Zeman, Petr
  • Zeman, Hynek
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • University of Vienna
http://localhost/t...ganizacniJednotka
  • 23520
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software