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Description
  • Ta-Si-N films are used as diffusion barriers between Cu and Si in VLSI technology because they are amorphous and exhibit a good thermal stability. Due to good mechanical properties and a high oxidation resistance, the Ta-Si-N films are also used as pro tective coatings. Si stabilizes an amorphous structure in the film, improves its mechanical properties, such as hardness and adhesion strength.
  • Ta-Si-N films are used as diffusion barriers between Cu and Si in VLSI technology because they are amorphous and exhibit a good thermal stability. Due to good mechanical properties and a high oxidation resistance, the Ta-Si-N films are also used as pro tective coatings. Si stabilizes an amorphous structure in the film, improves its mechanical properties, such as hardness and adhesion strength. (en)
Title
  • High-temperature behavior of Ta-Si-N thin films with a high content of Si
  • High-temperature behavior of Ta-Si-N thin films with a high content of Si (en)
skos:prefLabel
  • High-temperature behavior of Ta-Si-N thin films with a high content of Si
  • High-temperature behavior of Ta-Si-N thin films with a high content of Si (en)
skos:notation
  • RIV/49777513:23520/03:00000136!RIV/2004/MSM/235204/N
http://linked.open.../vavai/riv/strany
  • 60-61
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ME 529), Z(MSM 235200002)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...dnocenehoVysledku
  • 608864
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/03:00000136
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • thermal stability;thermogravimety;DSC; oxidation resistance;Ta-Si-N (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [8AFC84F8EF63]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • JUNIORMAT '03
http://linked.open...in/vavai/riv/obor
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http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Zeman, Petr
  • Zeman, Hynek
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • University of Technology
https://schema.org/isbn
  • 80-214-2462-1
http://localhost/t...ganizacniJednotka
  • 23520
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