About: Magnetron sputtered Cr-Ni-N and Ti-Mo-N films: comparison of mechanical properties

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	This article reports on structure and mechanical properties of Cr-Ni-N and Ti-Mo-N films with a low (<10 at.%) content of Ni or Mo, respectively. The films were deposited by reactive sputtering using d.c. unbalanced magnetron equipped with a round planarCr target fixed to the magnetron cathode with a Ni ring or alloyed TiMo (90:10 at.%) target. The investigation of sputtered films showed that: (i) both Cr-Ni-N and Ti-Mo-N films can form a superhard material with a maximum microhardness Hmax of approximately 45 GPa; (ii) the films with Hmax exhibit a single-oriented structure and; (iii) the Cr-Ni-N films exhibit a higher resistance to plastic deformation compared to the Ti-Mo-N films. The relationships between microhardness, reduced Young's modulus and elastic recovery evaluated from loading/unloading curves measured a computer-controlled microhardness tester Fischerscope H100 are given. This article reports on structure and mechanical properties of Cr-Ni-N and Ti-Mo-N films with a low (<10 at.%) content of Ni or Mo, respectively. The films were deposited by reactive sputtering using d.c. unbalanced magnetron equipped with a round planarCr target fixed to the magnetron cathode with a Ni ring or alloyed TiMo (90:10 at.%) target. The investigation of sputtered films showed that: (i) both Cr-Ni-N and Ti-Mo-N films can form a superhard material with a maximum microhardness Hmax of approximately 45 GPa; (ii) the films with Hmax exhibit a single-oriented structure and; (iii) the Cr-Ni-N films exhibit a higher resistance to plastic deformation compared to the Ti-Mo-N films. The relationships between microhardness, reduced Young's modulus and elastic recovery evaluated from loading/unloading curves measured a computer-controlled microhardness tester Fischerscope H100 are given. (en)
Title	Magnetron sputtered Cr-Ni-N and Ti-Mo-N films: comparison of mechanical properties Magnetron sputtered Cr-Ni-N and Ti-Mo-N films: comparison of mechanical properties (en)
skos:prefLabel	Magnetron sputtered Cr-Ni-N and Ti-Mo-N films: comparison of mechanical properties Magnetron sputtered Cr-Ni-N and Ti-Mo-N films: comparison of mechanical properties (en)
skos:notation	RIV/49777513:23520/01:00064889!RIV/2002/GA0/235202/N
http://linked.open.../vavai/riv/strany	S. 146-151
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GV106/96/K245), P(ME 173), P(ME 203), Z(MSM 235200002)
http://linked.open...iv/cisloPeriodika	leden
http://linked.open...vai/riv/dodaniDat	2002
http://linked.open...aciTvurceVysledku	Musil, Jindřich
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta aplikovaných věd
http://linked.open...dnocenehoVysledku	685769
http://linked.open...ai/riv/idVysledku	RIV/49777513:23520/01:00064889
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Cr-Ni-N and Ti-Mo-N films; Structure; Mechanical properties; Magnetron sputtering; High-tempera (en)
http://linked.open.../riv/klicoveSlovo	Cr-Ni-N and Ti-Mo-N films High-tempera Magnetron sputtering Mechanical properties Structure
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[56B8AAC9623A]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/ME%20203 Hard and superhard coatings prepared by unconventional plasma processes http://linked.opendata.cz/resource/domain/vavai/projekt/ME%20173
http://linked.open...UplatneniVysledku	2001
http://linked.open...v/svazekPeriodika	Vol. 142
http://linked.open...iv/tvurceVysledku	Musil, Jindřich Regent, Filip
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20235200002
issn	0257-8972
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	23520

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