About: Hard and superhard nanocomposite AL-Cu-N films prepared by magnetron sputtering

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About: Hard and superhard nanocomposite AL-Cu-N films prepared by magnetron sputtering Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The article reports on structure, mechanical properties and macrostress of Al-Cu-N films deposited by reactive sputtering using a dc unbalanced magnetron equipped with a round planar aluminium target fixed to the magnetron cathode with a copper ring. A systematic investigation of sputtered films showed that: (i) Al-Cu-N is a new nanocomposite material which can form superhard (>40 GPa) coatings with a maximum microhardness of approximately 48 GPa; (ii) Al-Cu-N can easily form a very fine-grained material; (iii) the size of grains decides on the macrostress in Al-Cu-N films; the Al-Cu-N films composed of grains with the average size of 9.5 nm exhibit a low (<0.5 GPa) macrostress and, on the contrary, the Al-Cu-N films composed of larger (>10 nm) grains exhibit large macrostress of several GPa; and (iv) the macrostress in Al-Cu-N films can be varied from tension to compression by the variation of the energy delivered to the growing film. The article reports on structure, mechanical properties and macrostress of Al-Cu-N films deposited by reactive sputtering using a dc unbalanced magnetron equipped with a round planar aluminium target fixed to the magnetron cathode with a copper ring. A systematic investigation of sputtered films showed that: (i) Al-Cu-N is a new nanocomposite material which can form superhard (>40 GPa) coatings with a maximum microhardness of approximately 48 GPa; (ii) Al-Cu-N can easily form a very fine-grained material; (iii) the size of grains decides on the macrostress in Al-Cu-N films; the Al-Cu-N films composed of grains with the average size of 9.5 nm exhibit a low (<0.5 GPa) macrostress and, on the contrary, the Al-Cu-N films composed of larger (>10 nm) grains exhibit large macrostress of several GPa; and (iv) the macrostress in Al-Cu-N films can be varied from tension to compression by the variation of the energy delivered to the growing film. (en)
Title	Hard and superhard nanocomposite AL-Cu-N films prepared by magnetron sputtering Hard and superhard nanocomposite AL-Cu-N films prepared by magnetron sputtering (en)
skos:prefLabel	Hard and superhard nanocomposite AL-Cu-N films prepared by magnetron sputtering Hard and superhard nanocomposite AL-Cu-N films prepared by magnetron sputtering (en)
skos:notation	RIV/49777513:23520/01:00064887!RIV/2002/GA0/235202/N
http://linked.open.../vavai/riv/strany	s. 603-609
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GV106/96/K245), P(ME 173), P(ME 203), Z(MSM 235200002)
http://linked.open...iv/cisloPeriodika	leden
http://linked.open...vai/riv/dodaniDat	2002
http://linked.open...aciTvurceVysledku	Zeman, Petr Musil, Jindřich Čerstvý, Radomír Zeman, Hynek
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta aplikovaných věd
http://linked.open...dnocenehoVysledku	681457
http://linked.open...ai/riv/idVysledku	RIV/49777513:23520/01:00064887
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nc-AlNx/Cu nanocomposite films; Structure; Macrostress; Mechanical properties; Magnetron sputte (en)
http://linked.open.../riv/klicoveSlovo	Mechanical properties Structure Macrostress Magnetron sputte nc-AlNx/Cu nanocomposite films
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[8B63FA9D9699]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/ME%20203 Hard and superhard coatings prepared by unconventional plasma processes http://linked.opendata.cz/resource/domain/vavai/projekt/ME%20173
http://linked.open...UplatneniVysledku	2001
http://linked.open...v/svazekPeriodika	Vol. 142
http://linked.open...iv/tvurceVysledku	Musil, Jindřich Zeman, Petr Čerstvý, Radomír Hrubý, Hynek Zeman, Hynek
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20235200002
issn	0257-8972
number of pages	7 (xsd:int)
http://localhost/t...ganizacniJednotka	23520

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