About: Magnetron with gas injection through hollow cathodes machined in sputtered target     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • This article reports on a magnetron equipped with a target with holes. The holes machined in sputtered target can sustain hollow cathode discharges and/or inject the sputtering gas directly inside the magnetron discharge. This magnetron operates on the same principle as a gas-jet. It is shown that the size and number of holes can efficiently control I-V characteristics of the magnetron. The holes of large (>= 2 mm) diameter can sustain hollow cathode discharges, which intensify the magnetron discharge.
  • This article reports on a magnetron equipped with a target with holes. The holes machined in sputtered target can sustain hollow cathode discharges and/or inject the sputtering gas directly inside the magnetron discharge. This magnetron operates on the same principle as a gas-jet. It is shown that the size and number of holes can efficiently control I-V characteristics of the magnetron. The holes of large (>= 2 mm) diameter can sustain hollow cathode discharges, which intensify the magnetron discharge. (en)
Title
  • Magnetron with gas injection through hollow cathodes machined in sputtered target
  • Magnetron with gas injection through hollow cathodes machined in sputtered target (en)
skos:prefLabel
  • Magnetron with gas injection through hollow cathodes machined in sputtered target
  • Magnetron with gas injection through hollow cathodes machined in sputtered target (en)
skos:notation
  • RIV/49777513:23520/01:00064882!RIV/2002/GA0/235202/N
http://linked.open.../vavai/riv/strany
  • s. 296-304
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GV106/96/K245), P(ME 173), P(ME 203), Z(MSM 235200002)
http://linked.open...iv/cisloPeriodika
  • leden
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 685771
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/01:00064882
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Magnetron; Hollow cathodes; Gas injection inside discharge; Reactive sputtering (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [548A885D3E95]
http://linked.open...i/riv/nazevZdroje
  • Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • Vol. 148
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Vlček, Jaroslav
  • Baroch, Pavel
  • Poláková, Helena
http://linked.open...n/vavai/riv/zamer
issn
  • 0257-8972
number of pages
http://localhost/t...ganizacniJednotka
  • 23520
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software