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  • A low-alloy steel was nitrided in the downstream zone of an electron cyclotron resonance (ECR) discharge at low pressure (0.15-0.25 Pa). Structure and properties of the nitrided surfaces were primarily controlled by the temperature Ts, the nitrogen-hydrogen-argon gas mix composition, and the substrate bias voltage Ub (-1000 - +40 V) at a typical value of the incident microwave power Pi = 900 W, the distance of the substrate from output aperture of the ECR source was d = 250 mm, and the nitriding time t = 2 h.
  • A low-alloy steel was nitrided in the downstream zone of an electron cyclotron resonance (ECR) discharge at low pressure (0.15-0.25 Pa). Structure and properties of the nitrided surfaces were primarily controlled by the temperature Ts, the nitrogen-hydrogen-argon gas mix composition, and the substrate bias voltage Ub (-1000 - +40 V) at a typical value of the incident microwave power Pi = 900 W, the distance of the substrate from output aperture of the ECR source was d = 250 mm, and the nitriding time t = 2 h. (en)
Title
  • Microwave plasma nitriding of a low-alloy steel
  • Microwave plasma nitriding of a low-alloy steel (en)
skos:prefLabel
  • Microwave plasma nitriding of a low-alloy steel
  • Microwave plasma nitriding of a low-alloy steel (en)
skos:notation
  • RIV/49777513:23520/00:00057347!RIV/2001/GA0/235201/N
http://linked.open.../vavai/riv/strany
  • 2715
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GV106/96/K245), P(ME 203), P(VS96059), Z(MSM 235200002)
http://linked.open...iv/cisloPeriodika
  • č. 6
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Musil, Jindřich
  • Růžička, Milan
  • Vlček, Jaroslav
  • Bělský, Petr
  • Čerstvý, Radomír
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 717445
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/00:00057347
http://linked.open...riv/jazykVysledku
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [83122921B68F]
http://linked.open...i/riv/nazevZdroje
  • Journal of Vacuum Science and Technology A
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • Vol. 18
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Růžička, Milan
  • Vlček, Jaroslav
  • Bělský, Petr
  • Čerstvý, Radomír
  • Hovorka, David
http://linked.open...n/vavai/riv/zamer
issn
  • 0734-2101
number of pages
http://localhost/t...ganizacniJednotka
  • 23520
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