About: Laser Doppler vibrometry for evaluating the piezoelectric coefﬁcient d33 on thin ﬁlm

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About: Laser Doppler vibrometry for evaluating the piezoelectric coefﬁcient d33 on thin ﬁlm Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The problem of electromechanical ﬁlm characterization, and, in particular, the determination of the piezoelectric activities of thin ﬁlms deposited on substrates, is of fundamental importance in the development of structures for microelectromechanical system MEMS applications. In this article, we present and compare some results obtained on different experimental setup for the determination of the d33 coefﬁcient. We have optimized the experimental conditions using a laser Doppler vibrometer. The main problem is the contribution of the bending effect of the substrates on the d33 coefﬁcient, which is an intrinsic property of the ﬁlm. We show that the d33 values are directly related to parameters such as the top electrode diameter and the substrate holder. The results are in agreement with those obtained with the conventional double beam interferometer used to account for substrate bending. The problem of electromechanical ﬁlm characterization, and, in particular, the determination of the piezoelectric activities of thin ﬁlms deposited on substrates, is of fundamental importance in the development of structures for microelectromechanical system MEMS applications. In this article, we present and compare some results obtained on different experimental setup for the determination of the d33 coefﬁcient. We have optimized the experimental conditions using a laser Doppler vibrometer. The main problem is the contribution of the bending effect of the substrates on the d33 coefﬁcient, which is an intrinsic property of the ﬁlm. We show that the d33 values are directly related to parameters such as the top electrode diameter and the substrate holder. The results are in agreement with those obtained with the conventional double beam interferometer used to account for substrate bending. (en)
Title	Laser Doppler vibrometry for evaluating the piezoelectric coefﬁcient d33 on thin ﬁlm Laser Doppler vibrometry for evaluating the piezoelectric coefﬁcient d33 on thin ﬁlm (en)
skos:prefLabel	Laser Doppler vibrometry for evaluating the piezoelectric coefﬁcient d33 on thin ﬁlm Laser Doppler vibrometry for evaluating the piezoelectric coefﬁcient d33 on thin ﬁlm (en)
skos:notation	RIV/46747885:24510/06:#0000273!RIV10-GA0-24510___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA202/03/0569)
http://linked.open...iv/cisloPeriodika	77
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Šulc, Miroslav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Technická univerzita v Liberci / Fakulta přírodovědně-humanitní a pedagogická
http://linked.open...dnocenehoVysledku	482935
http://linked.open...ai/riv/idVysledku	RIV/46747885:24510/06:#0000273
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Thin films, Doppler vibrometry, piezoelectric coefficient (en)
http://linked.open.../riv/klicoveSlovo	Thin films Doppler vibrometry piezoelectric coefficient
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[CFA48D17220D]
http://linked.open...i/riv/nazevZdroje	REVIEW OF SCIENTIFIC INSTRUMENTS
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Electromechanical properties of ceramics and layer composites
http://linked.open...UplatneniVysledku	2006
http://linked.open...v/svazekPeriodika	neuvedeno
http://linked.open...iv/tvurceVysledku	Šulc, Miroslav
issn	0034-6748
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	24510
is http://linked.open...avai/riv/vysledek of	Laser Doppler vibrometry for evaluating the piezoelectric coefﬁcient d33 on thin ﬁlm Laser Doppler vibrometry for evaluating the piezoelectric coefﬁcient d33 on thin ﬁlm

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