About: Applications of TiO2 thin films with photocatalytic properties deposited by PECVD method with rating cathode

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Titanium dioxide thin film has attracted great attention due to its unique properties like photocatalytic activity, optical, electrical and chemical properties making them suitable for many applications such as optical films, antireflection coating for solar cell, sensor material and photocatalytic self-cleaning and waste water purification. This work deals with TiOx thin films deposited by PECVD method in a planar reactor with powered heat-able substrate holder to reach layers with good photocatalytic activity. During process, the cathode was heating in the range 150 – 450°C and oxygen was used as a working gas, and Titan-IV-iso-propoxid as a precursor. The photocatalytic activity was tested using Acid Orange 7 and decomposition speed in contact to TiOx films exposed to UV/VIS light. The photocatalytic activity of the deposited films reached up to 40% of the sedimented P25 powder activity. Titanium dioxide thin film has attracted great attention due to its unique properties like photocatalytic activity, optical, electrical and chemical properties making them suitable for many applications such as optical films, antireflection coating for solar cell, sensor material and photocatalytic self-cleaning and waste water purification. This work deals with TiOx thin films deposited by PECVD method in a planar reactor with powered heat-able substrate holder to reach layers with good photocatalytic activity. During process, the cathode was heating in the range 150 – 450°C and oxygen was used as a working gas, and Titan-IV-iso-propoxid as a precursor. The photocatalytic activity was tested using Acid Orange 7 and decomposition speed in contact to TiOx films exposed to UV/VIS light. The photocatalytic activity of the deposited films reached up to 40% of the sedimented P25 powder activity. (en)
Title	Applications of TiO2 thin films with photocatalytic properties deposited by PECVD method with rating cathode Applications of TiO2 thin films with photocatalytic properties deposited by PECVD method with rating cathode (en)
skos:prefLabel	Applications of TiO2 thin films with photocatalytic properties deposited by PECVD method with rating cathode Applications of TiO2 thin films with photocatalytic properties deposited by PECVD method with rating cathode (en)
skos:notation	RIV/46747885:24210/10:#0001619!RIV11-MSM-24210___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M0577)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Michalčík, Zdeněk Špatenka, Petr Horáková, Marta
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Technická univerzita v Liberci / Fakulta strojní
http://linked.open...dnocenehoVysledku	247547
http://linked.open...ai/riv/idVysledku	RIV/46747885:24210/10:#0001619
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	plasma; titanium dioxide; RF PE CVD (en)
http://linked.open.../riv/klicoveSlovo	RF PE CVD plasma titanium dioxide
http://linked.open...ontrolniKodProRIV	[6F65CFEA982D]
http://linked.open...v/mistoKonaniAkce	Orlando, FL USA
http://linked.open...i/riv/mistoVydani	Albuquerque
http://linked.open...i/riv/nazevZdroje	53rd Annual Technical Conference Proceedings : Society of Vacuum Coaters
http://linked.open...in/vavai/riv/obor	JP
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Research centre for nanostructures engineering
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Špatenka, Petr HORÁKOVÁ, Marta MICHALČÍK, Zdeněk HORSKÁ, I. KLEMENTOVÁ, Š. KŘÍŽ, P.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-01-01 (xsd:date)
issn	0737-5921
number of pages	3 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Albuquerque, N.M. : Society of Vacuum Coaters
http://localhost/t...ganizacniJednotka	24210
is http://linked.open...avai/riv/vysledek of	Applications of TiO2 thin films with photocatalytic properties deposited by PECVD method with rating cathode Applications of TiO2 thin films with photocatalytic properties deposited by PECVD method with rating cathode Applications of TiO2 thin films with photocatalytic properties deposited by PECVD method with rating cathode

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