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  • Cílem této studie je vliv žíhání ns vlastnosti kovu dopovaného tenkými filmy oxidu titaničitého (M/TiO2) naneseného stejnosměrným reaktivním magnetronovým naprašováním a dopovaného stříbrem, mědí a zlatem. Nanesené M/TiO2 filmy jisou amorfní. Jak je známo z literatury, nejvyšší fotokatalytická účinnost byla pozorována na krystalických filmech se strukturou anatasu . Tato anatasová struktura se tvoří s použitím vysoké teploty substrátu během depozice nebo náslesdným žíháním. K podpoře krystalizace jsme žíhali M/TiO2 filmy při 300°C 1 hodinui. Krystalová struktura filmů byla pozorována nízkoúhlovou rentgenovou difrakční analýzou. Optické vlastnosti byly studovány UV/VIS spectrofotometrií. Fotokatalytická aktivita byla vyhodnocována z rychlosti rozkladu vodného roztoku Orange 7, vystavenému UV světlu. Byla prtovedena sumarizace vztahů mezi právě naneseným a vyžíhaným filmem, vlastnosti, parametry nanášení a fotokatalytická aktivita. (cs)
  • The aim of this study is influence of the annealing on properties of metal-doped titanium dioxide (M/TiO2) thin films deposited by dc reactive magnetron sputtering and doped by silver, copper and gold. The as-deposited M/TiO2 films are amorphous. As is well known from literature, the highest photocatalytic efficiency was observed on the crystalline films with anatase structure[1]. This anatase structure is formed using high temperature of the substrate during deposition or post-annealing. To support crystallization we have annealed M/TiO2 films at 300°C during 1 hour. Crystalline structure of the films was observed by low angle XRD analysis. Optical properties were studied by UV/VIS spectrophotometry. The photocatalytic activity was evaluated from decomposition speed of aqueous solution of the Orange 7, exposed to UV light. A summarization of relations between as-deposited and annealed films properties, deposition parameters and photocatalytic activity was made.
  • The aim of this study is influence of the annealing on properties of metal-doped titanium dioxide (M/TiO2) thin films deposited by dc reactive magnetron sputtering and doped by silver, copper and gold. The as-deposited M/TiO2 films are amorphous. As is well known from literature, the highest photocatalytic efficiency was observed on the crystalline films with anatase structure[1]. This anatase structure is formed using high temperature of the substrate during deposition or post-annealing. To support crystallization we have annealed M/TiO2 films at 300°C during 1 hour. Crystalline structure of the films was observed by low angle XRD analysis. Optical properties were studied by UV/VIS spectrophotometry. The photocatalytic activity was evaluated from decomposition speed of aqueous solution of the Orange 7, exposed to UV light. A summarization of relations between as-deposited and annealed films properties, deposition parameters and photocatalytic activity was made. (en)
Title
  • The influence of annealing on the M/TiO2 thin films deposited by magnetron sputtering.
  • Vliv žíhání na tenké M/TiO2 filmy vyloučené magnetronovým naprašováním. (cs)
  • The influence of annealing on the M/TiO2 thin films deposited by magnetron sputtering. (en)
skos:prefLabel
  • The influence of annealing on the M/TiO2 thin films deposited by magnetron sputtering.
  • Vliv žíhání na tenké M/TiO2 filmy vyloučené magnetronovým naprašováním. (cs)
  • The influence of annealing on the M/TiO2 thin films deposited by magnetron sputtering. (en)
skos:notation
  • RIV/46747885:24210/08:#0000406!RIV09-MSM-24210___
http://linked.open...avai/riv/aktivita
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  • P(1M0577)
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  • 372036
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  • RIV/46747885:24210/08:#0000406
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  • M/TiO2; thin films; annealing; magnetron co-sputtering (en)
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  • [21844C6122F2]
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  • Liberec
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  • 2-nd International Student Conference of Department of Material Science [CD-ROM].
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  • Horáková, Marta
  • Špatenka, Petr
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number of pages
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  • Technická univerzita v Liberci
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  • 978-80-7372-393-4
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  • 24210
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