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Description
  • Cílem článku je srovnání povlaků oxidu titanu deponovaných pomocí vodních par (PVD) a pomocí vodních par a plasmy (PEVCD) z různých zdrojů. Povlaky jsou charakterizovány různými technikami včetně měření tvrdosti a tloušťky. Morfologie a struktura byla zkumána pomocí elektronového mikroskopu a RTG analýzou. Chemické složení vrstev bylo zkoumáno infračervenou stereoskopií, elektronovou stereoskopií pro chemické rozbory (ESCA), Ruthrefordovým zpětným rozptylem (RPS) a pružnou detekční odrazivou analýzou (EDA). (cs)
  • The aim of the presented work is a comparison of titanium oxide coatings deposited by physical vapour deposition (PVD) and plasma enhanced chemical vapour deposition (PECVD) from various precursors. The films were characterized by various techniques inclding measurements of hardness and thickness. The coating morphology and structure were investigated by scanning electron microscopy (SEM) and RTG analysis. Chemical composition of the layers was studied by infrared spectroscopy, electron spectroscopy forchemical analyses (ESCA), Ruthreford back scattering (RBS) and elastic recoil detection analysis (ERDA).
  • The aim of the presented work is a comparison of titanium oxide coatings deposited by physical vapour deposition (PVD) and plasma enhanced chemical vapour deposition (PECVD) from various precursors. The films were characterized by various techniques inclding measurements of hardness and thickness. The coating morphology and structure were investigated by scanning electron microscopy (SEM) and RTG analysis. Chemical composition of the layers was studied by infrared spectroscopy, electron spectroscopy forchemical analyses (ESCA), Ruthreford back scattering (RBS) and elastic recoil detection analysis (ERDA). (en)
Title
  • Comparison of titanium oxide coatings deposited by PVD and PECVD
  • Comparison of titanium oxide coatings deposited by PVD and PECVD (en)
  • Porovnání povlaků oxidu titanu nanesených na PVD a PECVD (cs)
skos:prefLabel
  • Comparison of titanium oxide coatings deposited by PVD and PECVD
  • Comparison of titanium oxide coatings deposited by PVD and PECVD (en)
  • Porovnání povlaků oxidu titanu nanesených na PVD a PECVD (cs)
skos:notation
  • RIV/46747885:24210/04:24210044!RIV/2005/MSM/242105/N
http://linked.open.../vavai/riv/strany
  • %22538;542%22
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(OC 527.60)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 558334
http://linked.open...ai/riv/idVysledku
  • RIV/46747885:24210/04:24210044
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Titan, oxide, coatings, PVD, PECVD (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [3A5ED58D55F8]
http://linked.open...v/mistoKonaniAkce
  • SVC - The Society of Vacuum Coaters, Dallas, USA
http://linked.open...i/riv/mistoVydani
  • SVC - The Society of Vacuum Coaters, Dallas, USA
http://linked.open...i/riv/nazevZdroje
  • 2004 47th Technical Conference Proceedings
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Ganev, N.
  • Karásek, Jiří
  • Špatenka, Petr
  • Polcar, T.
  • Kolouch, Aleš
  • Macková, A.
  • Krumeich, Jorg
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
issn
  • 0737-5921
number of pages
http://purl.org/ne...btex#hasPublisher
  • SVC - The Society of Vacuum Coaters, Dallas, USA
http://localhost/t...ganizacniJednotka
  • 24210
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