About: RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Composite films of tin and hydrocarbon plasma polymer were prepared by RF magnetron sputtering in a working gas mixture consisting of Ar and n-hexane vapours. Even a small amount of n-hexane (<1%) leads to drastic increase of hydrocarbon content in the films. Tin was found to be strongly oxidized and heterogeneous distribution of SnOx grains was detected. The size of the grains affects the electrical properties of the films. Composite films of tin and hydrocarbon plasma polymer were prepared by RF magnetron sputtering in a working gas mixture consisting of Ar and n-hexane vapours. Even a small amount of n-hexane (<1%) leads to drastic increase of hydrocarbon content in the films. Tin was found to be strongly oxidized and heterogeneous distribution of SnOx grains was detected. The size of the grains affects the electrical properties of the films. (en)
Title	RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture (en)
skos:prefLabel	RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture (en)
skos:notation	RIV/44555601:13440/09:00004906!RIV10-MSM-13440___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(KAN101120701), P(LC06041)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Pavlík, Jaroslav Matoušek, Jindřich Novák, Stanislav Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	339334
http://linked.open...ai/riv/idVysledku	RIV/44555601:13440/09:00004906
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	composite film Sn/plasma polymer; TEM tomography; electrical properties (en)
http://linked.open.../riv/klicoveSlovo	electrical properties TEM tomography composite film Sn/plasma polymer
http://linked.open...ontrolniKodProRIV	[95ADE39BBDE6]
http://linked.open...v/mistoKonaniAkce	Liptovský Ján, Slovakia
http://linked.open...i/riv/mistoVydani	Bratislava, Slovakia
http://linked.open...i/riv/nazevZdroje	Book of Contributed Papers of 17th Symposium on Application of Plasma Processe - Visegrad Workshop on Research of Plasma Physics
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by energetic radiation. Nanocomposite films and nanoparticles prepared in low pressure plasma for surface modifications
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Matoušek, Jindřich Pavlík, Jaroslav Novák, Stanislav Strýhal, Zdeněk Kovačík, L. Bartipanová, P.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2009-01-17 (xsd:date)
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Comenius University in Bratislava; Humboldt-Club Slovakia Bratislava
https://schema.org/isbn	978-80-89186-46-4
http://localhost/t...ganizacniJednotka	13440
is http://linked.open...avai/riv/vysledek of	RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture

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