About: Study of Creation of Aluminium Oxide Thin Films in Oxygen Plasma

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Description	The aim of this work was to investigate structural features of insulating layers grown in a low temperature plasma. The experiments were performed in a system for plasma-chemical surface modification of thin films. The aim of this work was to investigate structural features of insulating layers grown in a low temperature plasma. The experiments were performed in a system for plasma-chemical surface modification of thin films. (en)
Title	Study of Creation of Aluminium Oxide Thin Films in Oxygen Plasma Study of Creation of Aluminium Oxide Thin Films in Oxygen Plasma (en)
skos:prefLabel	Study of Creation of Aluminium Oxide Thin Films in Oxygen Plasma Study of Creation of Aluminium Oxide Thin Films in Oxygen Plasma (en)
skos:notation	RIV/44555601:13430/99:00000108!RIV/2000/MSM/134300
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http://linked.open...avai/riv/aktivity	Z(MSM 113200002), Z(MSM 134300001)
http://linked.open...vai/riv/dodaniDat	2000
http://linked.open...aciTvurceVysledku	Hrach, Rudolf Pavlík, Jaroslav
http://linked.open.../riv/druhVysledku	A(V) - Audiovizuální tvorba se vzdáleným přístupem
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	755361
http://linked.open...ai/riv/idVysledku	RIV/44555601:13430/99:00000108
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open...ontrolniKodProRIV	[EDED1A74207C]
http://linked.open...i/riv/mistoVydani	Cancún
http://linked.open...vEdiceCisloSvazku	11th International Conference on Thin Films
http://linked.open...telVyzkumneZpravy	SOCIEDAD MEXICANA DE CIENCIA DE SUPERFICIES Y DE VACIO, A.C.
http://linked.open...in/vavai/riv/obor	BL
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http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...UplatneniVysledku	1999
http://linked.open...iv/tvurceVysledku	Hrach, Rudolf Pavlík, Jaroslav Šťovíček, Petr Hedbávný, Pavel
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20113200002 http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20134300001
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