About: Application of quadrupole mass spectrometry and gas chromatography for plasma analysis of neutral species of processing plasma

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	For a number of applications of plasma surface processing it is helpful to know the nature of the neutral species presented in the plasma. In our experiment the influence of the plasma gas composition on the plasma oxidation process in oxygen and oxygen/argon plasma was studied. The plasma gas phase reaction by-products were determined by using quadrupole mass spectrometry (QMS) and gas chromatography (GC) methods. The analysis of neutral plasma gas phase composition provides an information on changes in the plasma gas composition during the plasma oxidation of thin metal films and consequently on the stability and reproducibility of the plasma process. The experiments were carried out in the system for the plasma-chemical surface modification of thin films. For a number of applications of plasma surface processing it is helpful to know the nature of the neutral species presented in the plasma. In our experiment the influence of the plasma gas composition on the plasma oxidation process in oxygen and oxygen/argon plasma was studied. The plasma gas phase reaction by-products were determined by using quadrupole mass spectrometry (QMS) and gas chromatography (GC) methods. The analysis of neutral plasma gas phase composition provides an information on changes in the plasma gas composition during the plasma oxidation of thin metal films and consequently on the stability and reproducibility of the plasma process. The experiments were carried out in the system for the plasma-chemical surface modification of thin films. (en)
Title	Application of quadrupole mass spectrometry and gas chromatography for plasma analysis of neutral species of processing plasma Application of quadrupole mass spectrometry and gas chromatography for plasma analysis of neutral species of processing plasma (en)
skos:prefLabel	Application of quadrupole mass spectrometry and gas chromatography for plasma analysis of neutral species of processing plasma Application of quadrupole mass spectrometry and gas chromatography for plasma analysis of neutral species of processing plasma (en)
skos:notation	RIV/44555601:13430/03:00002321!RIV/2004/MSM/134304/N
http://linked.open.../vavai/riv/strany	119
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(OC 527.50), Z(MSM 134300001)
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Škoda, Jiří Pavlík, Jaroslav Malý, Marek Novák, Stanislav Rejnek, Jaroslav Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	598913
http://linked.open...ai/riv/idVysledku	RIV/44555601:13430/03:00002321
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	QMS, gas chromatografie, plasma dia (en)
http://linked.open.../riv/klicoveSlovo	QMS gas chromatografie plasma dia
http://linked.open...ontrolniKodProRIV	[FE718C984E36]
http://linked.open...v/mistoKonaniAkce	Taormina - Italy
http://linked.open...i/riv/mistoVydani	Bari
http://linked.open...i/riv/nazevZdroje	Proceedings of 16th International Symposium on Plasma Chemistry
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.50
http://linked.open...UplatneniVysledku	2003
http://linked.open...iv/tvurceVysledku	Malý, Marek Pavlík, Jaroslav Škoda, Jiří Novák, Stanislav Strýhal, Zdeněk Rejnek, Jaroslav Hedbávný, P.
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2003-06-22 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20134300001
number of pages	1 (xsd:int)
http://purl.org/ne...btex#hasPublisher	University of Bari
http://localhost/t...ganizacniJednotka	13430

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