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Description
| - Plasma-wall interactions in discharge tube can generate trace impurities. These impurities together with impurities coming from gas bottles can play an important role in plasma oxidation process, since they can significantly influence plasma composition and consequently its properties. The paper deals with a comparative study of plasma characteristics obtained both for plasma generated in RF discharge in technological system for plasma surface modification and for plasma generated in DC discharge in laboratory system containing a glass discharge tube with high wall purity. The discharges were applied in pure oxygen. The main diagnostic technique applied in order to determine qualitative plasma composition was the optical emission spectrometry. We have mainly focused on atomic oxygen spectral lines and on the bands and lines of gas impurities. The gas impurities and the wall material of plasma source can significantly change the plasma properties during plasma oxidation. The optical emission spectr
- Plasma-wall interactions in discharge tube can generate trace impurities. These impurities together with impurities coming from gas bottles can play an important role in plasma oxidation process, since they can significantly influence plasma composition and consequently its properties. The paper deals with a comparative study of plasma characteristics obtained both for plasma generated in RF discharge in technological system for plasma surface modification and for plasma generated in DC discharge in laboratory system containing a glass discharge tube with high wall purity. The discharges were applied in pure oxygen. The main diagnostic technique applied in order to determine qualitative plasma composition was the optical emission spectrometry. We have mainly focused on atomic oxygen spectral lines and on the bands and lines of gas impurities. The gas impurities and the wall material of plasma source can significantly change the plasma properties during plasma oxidation. The optical emission spectr (en)
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Title
| - Study of Gas Impurities and Discharge Tube Material Influence on Plasma Composition during Plasma Oxidation: The Optical Emission Spectroscopy Study,
- Study of Gas Impurities and Discharge Tube Material Influence on Plasma Composition during Plasma Oxidation: The Optical Emission Spectroscopy Study, (en)
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skos:prefLabel
| - Study of Gas Impurities and Discharge Tube Material Influence on Plasma Composition during Plasma Oxidation: The Optical Emission Spectroscopy Study,
- Study of Gas Impurities and Discharge Tube Material Influence on Plasma Composition during Plasma Oxidation: The Optical Emission Spectroscopy Study, (en)
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skos:notation
| - RIV/44555601:13430/03:00002320!RIV/2004/MSM/134304/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GA202/03/0827), P(OC 527.50), Z(MSM 113200002), Z(MSM 134300001)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/44555601:13430/03:00002320
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - OES, plasma oxidation (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - FR - Francouzská republika
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...ocetUcastnikuAkce
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http://linked.open...nichUcastnikuAkce
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Hrachová, Věra
- Matoušek, Jindřich
- Pavlík, Jaroslav
- Kylian, O.
- Strýhal, Zdeněk
- Kaňka, A.
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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