About: Modelling and Diagnostics of Ar/O2 Plasma

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The simulation of dc glow discharge in argon/oxyfgen plasma is used for the study of plasma oxidation of aluminium films. Two steps for complete simulation are shown - a model of chemical reactions in the bulk plasma and a transport of charged species through the sheath to substrates. The experimental data about plasma parameters were obtained by OES and QMS. The simulation of dc glow discharge in argon/oxyfgen plasma is used for the study of plasma oxidation of aluminium films. Two steps for complete simulation are shown - a model of chemical reactions in the bulk plasma and a transport of charged species through the sheath to substrates. The experimental data about plasma parameters were obtained by OES and QMS. (en)
Title	Modelling and Diagnostics of Ar/O2 Plasma Modelling and Diagnostics of Ar/O2 Plasma (en)
skos:prefLabel	Modelling and Diagnostics of Ar/O2 Plasma Modelling and Diagnostics of Ar/O2 Plasma (en)
skos:notation	RIV/44555601:13430/01:00001431!RIV/2002/MSM/134302/N
http://linked.open.../vavai/riv/strany	2179-2184
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(OC 527.50), Z(MSM 134300001)
http://linked.open...vai/riv/dodaniDat	2002
http://linked.open...aciTvurceVysledku	Vicher, Miroslav Pavlík, Jaroslav Hrach, Rudolf Malý, Marek Novák, Stanislav Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	687241
http://linked.open...ai/riv/idVysledku	RIV/44555601:13430/01:00001431
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Computer modelling, Plasma diagnostics, OES, QMS (en)
http://linked.open.../riv/klicoveSlovo	OES Plasma diagnostics QMS Computer modelling
http://linked.open...ontrolniKodProRIV	[E865086F4115]
http://linked.open...v/mistoKonaniAkce	University of Orléans
http://linked.open...i/riv/mistoVydani	Orléans, Francie
http://linked.open...i/riv/nazevZdroje	Symposium proceedings 15th International Symposium on Plasma Chemistry, ISPC - 15
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.50
http://linked.open...UplatneniVysledku	2001
http://linked.open...iv/tvurceVysledku	Hrach, Rudolf Hrachová, Věra Malý, Marek Pavlík, Jaroslav Novák, Stanislav Strýhal, Zdeněk Vicher, Miroslav
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2001-07-09 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20134300001
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	GREMI, CNRS/University of Orléans
http://localhost/t...ganizacniJednotka	13430

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