About: Chromatic Monitoring of DownstreamMicrowave Plasma Source

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The application of the chromatic sensing for monitoring of a microwave plasma source is described. The emitted radiation from the plasma excited in the argon, oxygen and CF4 mixture was measured with three PIN - diodes with integrated optical filters. The response of the chromatics signals on variation of the power and gas composition was investigated. Whereas a good sensitivity of the integrated optical signal to the power was confirmed, only a limited sensitivity to the working gas mixture was found. The application of the chromatic sensing for monitoring of a microwave plasma source is described. The emitted radiation from the plasma excited in the argon, oxygen and CF4 mixture was measured with three PIN - diodes with integrated optical filters. The response of the chromatics signals on variation of the power and gas composition was investigated. Whereas a good sensitivity of the integrated optical signal to the power was confirmed, only a limited sensitivity to the working gas mixture was found. (en)
Title	Chromatic Monitoring of DownstreamMicrowave Plasma Source Chromatic Monitoring of DownstreamMicrowave Plasma Source (en)
skos:prefLabel	Chromatic Monitoring of DownstreamMicrowave Plasma Source Chromatic Monitoring of DownstreamMicrowave Plasma Source (en)
skos:notation	RIV/44555601:13430/00:00000566!RIV/2001/MSM/134301/N
http://linked.open.../vavai/riv/strany	481
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(OC 527.50), P(OK 401), Z(MSM 124100004), Z(MSM 134300001), Z(MSM 242100002)
http://linked.open...iv/cisloPeriodika	8
http://linked.open...vai/riv/dodaniDat	2001
http://linked.open...aciTvurceVysledku	Pavlík, Jaroslav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	706790
http://linked.open...ai/riv/idVysledku	RIV/44555601:13430/00:00000566
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open...ontrolniKodProRIV	[816B53250A2D]
http://linked.open...i/riv/nazevZdroje	Czechoslovak Journal of Physics
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/OK%20401 http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.50
http://linked.open...UplatneniVysledku	2000
http://linked.open...v/svazekPeriodika	50
http://linked.open...iv/tvurceVysledku	Pavlík, Jaroslav Šerý, M. Špatenka, P. Messelhäuser, J.
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20124100004 http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20134300001 http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20242100002
issn	0011-4626
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	13430

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