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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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Description
  • This work deals with estimation of the bond strength on the as-bonded interface by the razor blade test. The results are discussed with respect to the quality of the final SOI wafer. The effect of pre-bonding plasma activation of wafer surface in various gases as well as the effect of hydrophilicity or hydrophobicity of the surfaces is discussed.
  • This work deals with estimation of the bond strength on the as-bonded interface by the razor blade test. The results are discussed with respect to the quality of the final SOI wafer. The effect of pre-bonding plasma activation of wafer surface in various gases as well as the effect of hydrophilicity or hydrophobicity of the surfaces is discussed. (en)
Title
  • Direct wafer bonding for SOI
  • Direct wafer bonding for SOI (en)
skos:prefLabel
  • Direct wafer bonding for SOI
  • Direct wafer bonding for SOI (en)
skos:notation
  • RIV/26821532:_____/13:#0000072!RIV14-TA0-26821532
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(TA01010078)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 69800
http://linked.open...ai/riv/idVysledku
  • RIV/26821532:_____/13:#0000072
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • SOI, Silicon-On-Insulator, Bonding, Silicon, Semiconductor, Bonding (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [4101C81EF17B]
http://linked.open...v/mistoKonaniAkce
  • Kežmarské Žľaby. Slovenská republika
http://linked.open...i/riv/mistoVydani
  • Bratislava, Slovenská republika.
http://linked.open...i/riv/nazevZdroje
  • Proceedings of 23rd Joint Seminar %22Development of Materials Science in Research and Education%22
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Válek, Lukáš
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • CSACG
https://schema.org/isbn
  • 978-80-970896-5-8
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