About: DEMO SAMPLE (PROTOTYPE ) – V001/TA01010078 - W750S01/S00 SOI Wafers / 3 µm     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • Prototype (sample) of Bond and Grind Back Silicon-On-Insulator (BGSOI) wafer. BGSOI wafer diameter 150 mm, CZSi substrate sligthly doped by Boron (3-13 ohmcm), thickness 625 or 525 um, BOX (buried oxide layer) 620 nm, defect-free device layer thickness 3 +/- 0.3 um. Crystallographic orientation (100). Bonded interface: BOX/device layer. Back side surface: thermal oxide > 200 nm.
  • Prototype (sample) of Bond and Grind Back Silicon-On-Insulator (BGSOI) wafer. BGSOI wafer diameter 150 mm, CZSi substrate sligthly doped by Boron (3-13 ohmcm), thickness 625 or 525 um, BOX (buried oxide layer) 620 nm, defect-free device layer thickness 3 +/- 0.3 um. Crystallographic orientation (100). Bonded interface: BOX/device layer. Back side surface: thermal oxide > 200 nm. (en)
Title
  • DEMO SAMPLE (PROTOTYPE ) – V001/TA01010078 - W750S01/S00 SOI Wafers / 3 µm
  • DEMO SAMPLE (PROTOTYPE ) – V001/TA01010078 - W750S01/S00 SOI Wafers / 3 µm (en)
skos:prefLabel
  • DEMO SAMPLE (PROTOTYPE ) – V001/TA01010078 - W750S01/S00 SOI Wafers / 3 µm
  • DEMO SAMPLE (PROTOTYPE ) – V001/TA01010078 - W750S01/S00 SOI Wafers / 3 µm (en)
skos:notation
  • RIV/26821532:_____/12:#0000036!RIV13-TA0-26821532
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(TA01010078)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...onomickeParametry
  • Wafer costs < 60 USD.
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 130004
http://linked.open...ai/riv/idVysledku
  • RIV/26821532:_____/12:#0000036
http://linked.open...terniIdentifikace
  • V001/TA01010078-W750S01/S00
http://linked.open...riv/jazykVysledku
http://linked.open...vai/riv/kategorie
http://linked.open.../riv/klicovaSlova
  • SOI; Silicon-On-Insulator; BGSOI; Polished wafer (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [46B4B546DF38]
http://linked.open.../licencniPoplatek
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...echnickeParametry
  • Diameter 150 mm, substrate CZSi:B 3-13 ohmcm, (100), THK 625 or 525 um, BOX 620 nm, defect-free DL THK 3 +/- 0.3 um.
http://linked.open...iv/tvurceVysledku
  • Lorenc, Michal
  • Pospíšil, Miloš
  • Válek, Lukáš
  • Šik, Jan
http://linked.open...avai/riv/vlastnik
http://linked.open...itiJinymSubjektem
Faceted Search & Find service v1.16.116 as of Feb 22 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3239 as of Feb 22 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 67 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software