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Description
  • Thin film chemical vapour deposition technique has been used for more than 50 years. Introducing organosilicones as precursors, e.g. hexamethyldisiloxane (HMDSO) or tetraethyl orthosilicate (TEOS), brought new possibilities to this method. Barrier properties of thin films have become an important issue, especially for army and emergency services as well as for food and drink manufacturers. Our work is focused on deposition of protective HMDSO thin films via plasma enhanced chemical vapour deposition for encapsulating cleaned archaeological artefacts, preventing these historical objects from destructive corrosion objects.
  • Thin film chemical vapour deposition technique has been used for more than 50 years. Introducing organosilicones as precursors, e.g. hexamethyldisiloxane (HMDSO) or tetraethyl orthosilicate (TEOS), brought new possibilities to this method. Barrier properties of thin films have become an important issue, especially for army and emergency services as well as for food and drink manufacturers. Our work is focused on deposition of protective HMDSO thin films via plasma enhanced chemical vapour deposition for encapsulating cleaned archaeological artefacts, preventing these historical objects from destructive corrosion objects. (en)
Title
  • Thin Film Deposition of HMDSO for Barrier Applications in Archaeology
  • Thin Film Deposition of HMDSO for Barrier Applications in Archaeology (en)
skos:prefLabel
  • Thin Film Deposition of HMDSO for Barrier Applications in Archaeology
  • Thin Film Deposition of HMDSO for Barrier Applications in Archaeology (en)
skos:notation
  • RIV/00216305:26310/14:PU110499!RIV15-MSM-26310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 50432
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26310/14:PU110499
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • PECVD, barrier coating, HMDSO, OTR (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [81C9D4EFB995]
http://linked.open...v/mistoKonaniAkce
  • Belgrade
http://linked.open...i/riv/mistoVydani
  • Belgrade
http://linked.open...i/riv/nazevZdroje
  • Book of Contributed Papers of 27th Summer School and International Symposium on the Physics of Ionized Gases
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Krčma, František
  • Procházka, Michal
  • Blahová, Lucie
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • Neuveden
https://schema.org/isbn
  • 978-86-7762-600-6
http://localhost/t...ganizacniJednotka
  • 26310
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